Three-dimensional microstructuring of carbon by thermoplastic spacer evaporation during pyrolysis

Carbon

Volumn 46, Issue 13, 2008, Pages 1765-1772

  Yamada, Yasuhiro ^a   Chung, D D L ^a  

^a UNIVERSITY AT BUFFALO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMINES; BEAMS AND GIRDERS; BRIDGES; CARBON; CARBON BLACK; CARBON NANOTUBES; CHEMICAL REACTIONS; CURING; DRYING; ELECTRIC CONDUCTIVITY; EPOXY RESINS; EVAPORATION; MICROELECTROMECHANICAL DEVICES; MOISTURE; MULTIWALLED CARBON NANOTUBES (MWCN); NANOPARTICLES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTUBES; ORGANIC COMPOUNDS; PAINTING; PARAFFIN WAXES; PARAFFINS; PETROLEUM PRODUCTS; PYROLYSIS; REINFORCED PLASTICS; RESINS; SILVER; SUBSTRATES; SURFACE ROUGHNESS; THREE DIMENSIONAL; VAPORS;

ALUMINA SUBSTRATES; AMINE CURING; CRACKING TENDENCY; ELECTRICAL CONDUCTIVITY; ELECTRODE ARRAYS; FILLER CONTENTS; LOW VISCOSITY; MECHANICAL INTERLOCKING; MICRO SCALES; MICROSTRUCTURING; MULTI-WALLED CARBON NANOTUBE; NANO TUBE; NOVOLAC EPOXY; SILVER NANO-PARTICLES; ULTRA-VIOLET;

FILLERS;

EID: 52949093114     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2008.07.031     Document Type: Article

References (23)

1. Park B.Y., Taherabadi L., Wang C., Zoval J., and Madou M.J. Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media. J Electrochem Soc 152 12 (2005) J136-J143
2. Schueller O.J.A., Brittain S.T., and Whitesides G.M. Fabrication of glassy carbon microstructure by soft lithography. Sensor Actuator A72 (1999) 125-139
3. Seidemann V., Bütefisch S., and Büttgenbach S. Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers. Sensor Actuat A: Phys 97-98 (2002) 457-461
4. Malek C.G.K. SU8 resist for low-cost X-ray patterning of high-resolution, high aspect ratio MEMS. Microelectron J 33 (2002) 101-105
5. Wang C., Jia G., Taherabadi L.H., and Madou M.J. A novel method for the fabrication of high aspect ratio C-MEMS structures. J Microelectromech Syst 14 2 (2005) 348-358
6. Malladi K., Wang C., and Madou M. Fabrication of suspended carbon microstructures by e-beam writer and pyrolysis. Carbon 44 (2006) 2602-2607
7. Jeong O.C., and Konishi S. Three-dimensionally combined carbonized polymer sensor and heater. Sensor Actuat A 143 1 (2008) 97-105
8. Naka K, Konishi S. Design and fabrication of pyrolyzed polymer micro and nano structures. In: Proceedings of the international symposium on micro-nanomechatronics and human science, the eighth symposium "micro- and nanomechatronics for information-based society", the twenty-first century COE program, Nagoya University, Nagoya, Japan. Institute of Electrical and Electronics Engineers, New York, NY; 2005. p. 103-8.
9. Lee S., Teo K.B.K., Chhowalla M., Hasko D.G., Amaratunga G.A.J., Milne W.I., et al. Study of multiwalled carbon nanotube structures fabricated by PMMA suspended dispersion. Microelectron Eng 61-62 (2002) 475-483
10. Lee S., Teo K.B.K., Robinson L.A.W., Teh A.S., Chhowalla M., Hasko D.G., et al. Characteristics of multiwalled carbon nanotube nanobridges fabricated by poly(methylmethacrylate) suspended dispersion. J Vac Sci Technol B 20 6 (2002) 2773-2776
11. Yamada Y, Chung DDL. Epoxy-based carbon films with high electrical conductivity attached to an alumina substrate. Carbon, in press
12. Aoyagi Y, Chung DDL. Electrically conductive carbon films and their three-dimensional microstructuring. Extended abstracts, In: Proceedings of the international conference on carbon, Seattle, USA. American Carbon Society; 2007. p. B042.
13. Patel N., Okabe K., and Oya A. Designing carbon materials with unique shapes using polymer blending and coating techniques. Carbon 40 (2002) 315-320
14. Ozaki J., Endo N., Ohizumi W., Igarashi K., Nakahara M., and Oya A. Novel preparation method for the production of mesoporous carbon fiber from a polymer blend. Carbon 35 7 (1997) 1031-1033
15. Hulicova D., and Oya A. The polymer blend technique as a method for designing fine carbon materials. Carbon 41 (2003) 1443-1450
16. Sandou T., and Oya A. Preparation of carbon nanotubes by centrifugal spinning of coreshell polymer particles. Carbon 43 (2005) 2013-2032
17. Lim D.S., An J.W., and Lee H.J. Effect of carbon nanotube addition on the tribological behavior of carbon/carbon composites. Wear 252 (2002) 512-517
18. Wang C., Zaouk R., and Madou M. Local chemical vapor deposition of carbon nanofibers from photoresist. Carbon 44 (2006) 3073-3077
19. Sebastien J., Arnaud B., Heinrich H., and Philippe R. SU8-silver photosensitive nanocomposite. Adv Eng Mater 6 9 (2004) 719-724
20. Kim K.T., Cha S.I.I., Hong S.H., and Hong S.H. Microstructures and tensile behavior of carbon nanotube reinforced Cu matrix nanocomposites. Mater Sci Eng A 430 (2006) 27-33
21. Lu Q., Keskar G., Ciocan R., Rao R., Mathur R.B., Rao A.M., et al. Determination of carbon nanotube density by gradient sedimentation. J Phys Chem B 110 (2006) 24371-24376
22. Guedes M., Ferro A.C., and Ferreira J.M.F. Nucleation and crystal growth in commercial LAS compositions. J Eur Ceram Soc 21 (2001) 1187-1194
23. Singh A., Jayaram J., Madou M., and Akbar S. Pyrolysis of negative photoresists to fabricate carbon structures for microelectromechanical systems and electrochemical applications. J Electrochem Soc 149 3 (2002) E78-E83