Study progress on sculptured thin films by glancing angle deposition

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

Volumn 37, Issue 8, 2008, Pages 1317-1322

  Xiao, Xiudi ^a,b   Dong, Guoping ^a,b   Yu, Hua ^a,b   Fan, Zhengxiu ^a   He, Hongbo ^a   Shao, Jianda ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Anisotropy; Glancing angle deposition; Sculptured thin film (STF)

Indexed keywords

OPTICAL FILMS; OPTICAL PROPERTIES; SEMICONDUCTING CADMIUM TELLURIDE; SOLIDS; TECHNOLOGY; THICK FILMS; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

ANISOTROPY; FILM DESIGN; GLANCING ANGLE DEPOSITION; GLANCING ANGLES; NANO-COLUMNS; NEW TECHNOLOGIES; OPTICAL FIELDS; POTENTIAL APPLICATIONS; PREPARATION METHODS; PREPARATION PARAMETERS; SCULPTURED THIN FILM (STF); SCULPTURED THIN FILMS;

FILM PREPARATION;

EID: 52249119712     PISSN: 1002185X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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