Mechanical characterization of silicon nitride thin-films using microtensile specimens with integrated 2D diffraction gratings

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 223-226

  Gaspar, J ^a   Nurcahyo, Y ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; ELASTIC MODULI; EXTRACTION; FRACTURE TOUGHNESS; MEMS; NITRIDES; SILICON NITRIDE; THIN FILMS;

MECHANICAL CHARACTERIZATIONS; MICROTENSILE SPECIMENS; MONOCHROMATIC LIGHT; REFLECTIVE GRATINGS; SILICON NITRIDE THIN FILMS; SINGLE TEST STRUCTURE; STRAIN COMPONENTS; TRANSVERSAL DIRECTIONS;

DIFFRACTION GRATINGS;

EID: 52249115582     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4432964     Document Type: Conference Paper

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