Carbon nanotube-based strain sensing cantilevers

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 843-846

  Tong, Jianhua ^a   Priebe, Mark ^b   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b Systems for Research Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MULTIWALLED CARBON NANOTUBES (MWCN); NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTECHNOLOGY; NANOTUBES; NONMETALS; OPTICAL DESIGN; PHOTORESISTS; REACTIVE ION ETCHING; SILICON;

APPLIED STRAIN; CARBON NANOTUBES (CNTS); GAUGE FACTORS; INTERNATIONAL CONFERENCES; LINEAR RELATIONSHIPS; MICRO ELECTRODES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROFABRICATION PROCESSES; MULTI-WALLED CARBON NANOTUBES; RESISTANCE CHANGES; SILICON CANTILEVERS; STRAIN SENSING; TESTING RESULTS;

CARBON NANOTUBES;

EID: 52249097812     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)

1. R.G. Beck, M.A. Eriksson, M.A. Topinka, and R.W. Westervelt, "GaAs/AlGaAs self-sensing cantilevers for low temperature scanning probe microscopy," Appl. Phys. Lett., vol. 73, no. 8, pp. 1149-51, 1998.
2. T.W. Tombler, C. Zhou, L. Alexseyev, J. Kong, H. Dai, L. Liu, C.S. Jayanthi, M. Tang, and S.Y. Wu, "Reversible electromechanical characteristics of carbon nanotubes under local-manipulation," Nature, vol. 405, pp. 769-772, 2000.
3. E.D. Minot, Y. Yaish, V. Sazonova, J.Y. Park, M. Brink, and P.L. McEuen, "Tuning carbon nanotube band gaps with strain," Phys. Rev. Lett., vol. 90, no. 15, pp. 156401, 2003.
4. J. Cao, Q. Wang, and H. Dai, "Electromechanical properties of metallic, quasimetallic, and semiconducting carbon nanotubes under stretching," Phys. Rev. Lett., vol. 90, no. 15, pp. 157601, 2003.
5. C.K. M. Fung, M.Q.H. Zhang, R.H.M. Chan, and W.J. Li, "A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements," in Proc. IEEE MEMS 2005, Miami, 2005, pp. 251-254.
6. C. Stampfer, T. Helbling. D. Obergfell, B. Schöberle, M.K. Tripp, A. Jungen, S. Roth, V.M. Bright, and C. Hierold, "Fabrication of single-walled carbonnanotube-based pressure sensors," Nano Lett., vol. 6, no. 2, pp. 233 -237, 2006.
7. B. Mahar, C. Laslau, R. Yip, and Y. Sun, "Development of carbon nanotube-based sensors - a review," IEEE Sens. J., vol. 7, no. 1, 2007.
8. H.T. Soh, C.F. Quate, A.F. Morpurgo, C.M. Marcus, J. Kong, and H. Dai, "Integrated nanotube circuits: controlled growth and ohmic contacting of singlewalled carbon nanotubes," Appl. Phys.Lett., vol. 75, no. 5, pp. 627-629, 1999.
9. J. Kong, H.T. Soh, A.M. Cassell, C.F. Quate, and H. Dai, "Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers," Nature, vol. 395, pp. 878-881, 1998.
10. A.M. Cassell, N.R. Franklin, T.W. Tombler, E.M. Chan, J. Han, and H. Dai, "Directed growth of freestanding single-walled carbon nanotubes," J. Am. Chem. Soc., vol. 121, pp. 7975, 1999.
11. N.R. Franklin and H. Dai, "An enhanced CVD approach to extensive nanotube networks with directionality," Adv. Mater., vol. 12, pp. 890-894, 2000.
12. T. Fukuda, F. Arai, and L. Dong, "Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations," in Proc. IEEE, vol. 91, no. 11, pp. 1803-1818, 2003.
13. J. Chung, K.H. Lee, J. Lee, and R.S. Ruoff, "Toward large-scale integration of carbon nanotubes," Langmuir, vol. 20, no. 8, pp. 3011-3017, 2004.
14. J. Chung and J. Lee, "Nanoscale gap fabrication and integration of carbon nanotubes by micromachining," Sens. & Actu.: A. Physical, vol. 104, pp. 229-235, 2003.
15. M.S. Arnold, A.A. Green, J.F. Hulvat, S.I. Stupp, and M.C. Hersam, "Sorting carbon nanobutes by electronic structure using density differentiation," Nature Nanotech., vol. 1, pp. 60-65, 2006.
16. S. Evoy, N. DiLello, V. Deshpande, A. Narayanan, H. Liu, M. Riegelman, B.R. Martin, B. Hailer, J.C. Bradley, W. Weiss, T.S. Mayer, Y. Gogotsi, H.H. Bau, T.E. Mallouk, and S. Raman, "Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry," Microelec. Eng., vol. 75, pp. 31-42, 2004.