Nanoscale gap fabrication and integration of carbon nanotubes by micromachining

Sensors and Actuators, A: Physical

Volumn 104, Issue 3, 2003, Pages 229-235

  Chung, Jaehyun ^a   Lee, Junghoon ^a  

^a Northwestern University   (United States)

Author keywords

Carbon nanotubes; Electric field guided deposition; Nanoscale gap fabrication

Indexed keywords

ALUMINUM; ELECTRIC FIELDS; ETCHING; MICROMACHINING; NANOTECHNOLOGY; THIN FILMS;

NANOSCALE GAP FABRICATION; ROUNDED GAP; SHARP NANOSCALE GAP; SINGLE WALLED CARBON NANOTUBES;

CARBON NANOTUBES;

EID: 0037716789     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00025-6     Document Type: Article

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