Profilometry with a coherence scanning microscope

Applied Optics

Volumn 29, Issue 26, 1990, Pages 3784-3788

  Lee, Byron S ^a   Strand, Timothy C ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84903983714     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.29.003784     Document Type: Article

References (8)

1. T. C. Strand, “Optical Three-Dimensional Sensing for Machine Vision,” Opt. Eng. 24, 33-40 (1985).
2. T. C. Strand and Y. Katzir, “Extended Unambiguous Range Interferometry,” Appl. Opt. 26, 4274-4281 (1987).
3. T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, and T. C. Strand, “Laser Diode Feedback Interferometer for Stabilization and Displacement Measurements,” Appl. Opt. 26, 892-897 (1987).
4. J. C. Wyant, “Testing Aspherics Using Two-Wavelength Holography,” Appl. Opt. 10, 2113-2118 (1971).
5. C. C. Williams and H. K. Wickramasinghe, “Optical Ranging by Wavelength Multiplexed Interferometry,” J. Appl. Phys. 60, 1900-1902 (1986).
6. K. Creath, “Measuring Step Heights Using an Optical Profiler,” Proc. Soc. Photo-Opt. Instrum. Eng. 661, 296-301 (1986).
7. M. Davidson, K. Kaufman, and I. Mazor, “First Results of a Product Using Coherence Probe Imaging for Wafer Inspection,” Proc. Soc. Photo-Opt. Instrum. Eng. 921, 100-114 (1988).
8. M. Davidson, K. Kaufman, I. Mazor, and F. Cohen, “An Application of Interference Microscopy to Integrated Circuit Inspection and Metrology,” Proc. Soc. Photo-Opt. Instrum. Eng. 775, 233-247 (1987).