Influence of hydrogen annealing on NBTI performance

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 2008, Pages

  Jin, L J ^a   Kuan, H P ^a   Sim, D ^a   Mukhopadhyay, M ^a  

^a SYSTEMS ON SILICON MANUFACTURING CO PTE LTD   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EFFECT OF HYDROGEN; ELECTRICAL TESTING; EMBEDDED FLASH; HYDROGEN ANNEALING; INTERNATIONAL SYMPOSIUM; NEGATIVE BIAS- TEMPERATURE-INSTABILITY;

ANNEALING; ELECTRONICS INDUSTRY; FAILURE ANALYSIS; HYDROGEN; INTEGRATED CIRCUITS; NEGATIVE TEMPERATURE COEFFICIENT; NONMETALS; QUALITY ASSURANCE; RELIABILITY; SAFETY FACTOR; TECHNICAL PRESENTATIONS; THERMODYNAMIC STABILITY;

ELECTRIC NETWORK ANALYSIS;

EID: 51949116666     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2008.4588187     Document Type: Conference Paper

References (13)

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