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Volumn , Issue , 2008, Pages 41-44

A μg resolution microaccelerometer system with a second-order ∑-Δ readout circuitry

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS;

EID: 51849165963     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RME.2008.4595720     Document Type: Conference Paper
Times cited : (7)

References (10)
  • 1
    • 0032138896 scopus 로고    scopus 로고
    • Micromachined Inertial Sensors
    • N. Yazdi, F. Ayazi and K. Najafi, "Micromachined Inertial Sensors," IEEE Proc. 86, 1998, pp. 1640-1659.
    • (1998) IEEE Proc , vol.86 , pp. 1640-1659
    • Yazdi, N.1    Ayazi, F.2    Najafi, K.3
  • 2
    • 27544501742 scopus 로고    scopus 로고
    • Sub-Micro-Gravity Capacitive SOI Microaccelerometers
    • B. V. Amini, R. Abdolvand, and F. Ayazi, "Sub-Micro-Gravity Capacitive SOI Microaccelerometers," Tran. 2005, pp. 515-518.
    • (2005) Tran , pp. 515-518
    • Amini, B.V.1    Abdolvand, R.2    Ayazi, F.3
  • 3
    • 0036124337 scopus 로고    scopus 로고
    • Hybrid Silicon-On-Glass (SOG) Lateral Micro-Accelerometer with CMOS Readout Circuitry
    • J. Chae, H. Kulah and K. Najafi, "Hybrid Silicon-On-Glass (SOG) Lateral Micro-Accelerometer with CMOS Readout Circuitry," MEMS 2002, pp. 623-626.
    • MEMS 2002 , pp. 623-626
    • Chae, J.1    Kulah, H.2    Najafi, K.3
  • 4
    • 3042822186 scopus 로고    scopus 로고
    • A High Resolution, Stictionless CMOS Compatible SOI Accelerometer with a Low Noise, Low Power 0.25μm CMOS Interface
    • B. Amini, S. Pourkamali and F. Ayazi, "A High Resolution, Stictionless CMOS Compatible SOI Accelerometer with a Low Noise, Low Power 0.25μm CMOS Interface".MEMS 2004 pp572-575.
    • MEMS 2004 , pp. 572-575
    • Amini, B.1    Pourkamali, S.2    Ayazi, F.3
  • 5
    • 0348131430 scopus 로고    scopus 로고
    • Noise Analysis and Characterization of A Sigma-Delta Capacitive Silicon Microaccelerometer
    • H. Kulah, J. Chae and K. Najafi, "Noise Analysis and Characterization of A Sigma-Delta Capacitive Silicon Microaccelerometer," Transducers 2003, pp. 95-98.
    • (2003) Transducers , pp. 95-98
    • Kulah, H.1    Chae, J.2    Najafi, K.3
  • 6
    • 2442472919 scopus 로고    scopus 로고
    • An Integrated Surface Micromachined Capacitive Lateral Accelerometer with 2 μg/√Hz Resolution
    • X. Jiang, F. Wang, M. Kraft and B. E. Boser "An Integrated Surface Micromachined Capacitive Lateral Accelerometer with 2 μg/√Hz Resolution," Solid State Sensor and Actuator Workshop, 2002, pp. 202-205.
    • (2002) Solid State Sensor and Actuator Workshop , pp. 202-205
    • Jiang, X.1    Wang, F.2    Kraft, M.3    Boser, B.E.4
  • 8
    • 77955665167 scopus 로고    scopus 로고
    • A Capacitance Meter based on an Oversampling Sigma-Delta Modulator and Its Application to Capacitive Sensor Interface
    • R. Gallorini and N. Abouchi, "A Capacitance Meter based on an Oversampling Sigma-Delta Modulator and Its Application to Capacitive Sensor Interface," ICECS 2001, pp. 1537-1540.
    • ICECS 2001 , pp. 1537-1540
    • Gallorini, R.1    Abouchi, N.2
  • 9
    • 0033684961 scopus 로고    scopus 로고
    • A Noise Shaping Accelerometer Interface Circuit for Two Chip Implementation
    • T. Kajita, U. Moon and G. C. Temes, "A Noise Shaping Accelerometer Interface Circuit for Two Chip Implementation," ISCAS 2000, pp. 337-340.
    • ISCAS 2000 , pp. 337-340
    • Kajita, T.1    Moon, U.2    Temes, G.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.