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Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 515-518

Sub-micro-gravity capacitive SOI microaccelerometers

(3) Amini, B Vakili a Abdolvand, R a Ayazi, F a

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Capacitive SOI Accelerometers; CMOS Interface IC; MEMS; Nano Gravity Measurement

Indexed keywords

CAPACITIVE SOI ACCELEROMETER; CMOS INTERFACE IC; MEMS; NON-GRAVITY MEASUREMENT;

CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; SENSITIVITY ANALYSIS; SILICON ON INSULATOR TECHNOLOGY;

ACCELEROMETERS;

EID: 27544501742 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2005.1496467 Document Type: Conference Paper

Times cited : (23)

References (8)

1
- 84861260433
- Space Acceleration Measurement System (SAMS), http://microgravity.grc. nasa.gov/MSD/MSD_htmls/samsff.html

2
- 84862434889
- A high resolution, stictionless, CMOS-compatible SOI accelerometer with a low-noise, low-power, 0.25μm CMOS interface
- B. Vakili Amini, S. Pourkamali, and F. Ayazi "A high resolution, stictionless, CMOS-compatible SOI accelerometer with a low-noise, low-power, 0.25μm CMOS interface," MEMS 2004, pp. 272-275.
- MEMS 2004 , pp. 272-275
- Amini, B.V.¹ Pourkamali, S.² Ayazi, F.³

3
- 4544243335
- A new input switching scheme for a capacitive micro-g accelerometer
- B. Vakili Amini, S. Pourkamali, M. Zaman, and F. Ayazi, "A new input switching scheme for a capacitive micro-g accelerometer," Symposium on VLSI Circuits 2004, pp. 310-313.
- Symposium on VLSI Circuits 2004 , pp. 310-313
- Amini, B.V.¹ Pourkamali, S.² Zaman, M.³ Ayazi, F.⁴

4
- 10444247325
- A 2.5V 14-bit Sigma-Delta CMOS-SOI capacitive accelerometer
- Dec.
- B. Vakili Amini, and F. Ayazi, "A 2.5V 14-bit Sigma-Delta CMOS-SOI capacitive accelerometer," IEEE J. Solid-State Circuits, pp. 2467-2476, Dec. 2004.
- (2004) IEEE J. Solid-state Circuits , pp. 2467-2476
- Amini, B.V.¹ Ayazi, F.²

5
- 2442513540
- A low-noise low-offset capacitive sensing amplifier for a 50-μg/√Hz monolithic CMOS MEMS accelerometer
- May
- W. Jiangfeng, G. K. Fedder, and L. R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-μg/√Hz monolithic CMOS MEMS accelerometer," IEEE J. Solid-State Circuits, pp. 722-730, May 2004.
- (2004) IEEE J. Solid-state Circuits , pp. 722-730
- Jiangfeng, W.¹ Fedder, G.K.² Carley, L.R.³

6
- 0346240500
- A multi-step electromechanical Sigma-Delta converter for micro-g capacitive accelerometers
- H. Kulah, C. Junseok, N. Yazdi, and K. Najafi, "A multi-step electromechanical Sigma-Delta converter for micro-g capacitive accelerometers," ISSCC 2003, pp. 202-203.
- ISSCC 2003 , pp. 202-203
- Kulah, H.¹ Junseok, C.² Yazdi, N.³ Najafi, K.⁴

7
- 21844434732
- Thick single crystal Silicon MEMS with high aspect ratio vertical air-gaps
- P. Monajemi, and F. Ayazi, "Thick single crystal Silicon MEMS with high aspect ratio vertical air-gaps," SPIE 2005 Micromachining/ Microfabrication Process Technology, pp.138-147.
- SPIE 2005 Micromachining/Microfabrication Process Technology , pp. 138-147
- Monajemi, P.¹ Ayazi, F.²

8
- 0037817837
- An in-plane high-sensitivity, low-noise micro-g silicon accelerometer
- J. Chae, H. Kulah, and K. Najafi., "An in-plane high-sensitivity, low-noise micro-g silicon accelerometer," MEMS 2003, pp. 466-469.
- MEMS 2003 , pp. 466-469
- Chae, J.¹ Kulah, H.² Najafi, K.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.