Noise analysis and characterization of a sigma-delta capacitive silicon microaccelerometer

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 95-98

  Kulah, H ^a   Chae, Junseok ^a   Najafi, K ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

1f noise; Accelerometers; Capacitive sensors; Circuit noise; Delta sigma modulation; Dynamic range; Electrodes; Parasitic capacitance; Silicon; Working environment noise

Indexed keywords

ACCELEROMETERS; ACTUATORS; CAPACITANCE; CAPACITIVE SENSORS; DELTA SIGMA MODULATION; DIGITAL TO ANALOG CONVERSION; ELECTRODES; MICROSYSTEMS; MODULATORS; PULSE CIRCUITS; SILICON; TRANSDUCERS;

1F NOISE; CIRCUIT NOISE; DYNAMIC RANGE; PARASITIC CAPACITANCE; WORKING ENVIRONMENT;

SOLID-STATE SENSORS;

EID: 0348131430     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215261     Document Type: Conference Paper

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