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Applied Physics Letters

Volumn 93, Issue 10, 2008, Pages

Evidence for ion irradiation induced dissociation and reconstruction of Si-H bonds in hydrogen-implanted silicon

(6) Di, Z F a Wang, Y Q a Nastasi, M a Shao, L b Lee, J K c Theodore, N D d

a LOS ALAMOS NATIONAL LABORATORY (United States)

b Texas AandM University (United States)

c University of Pittsburgh (United States)

d FREESCALE SEMICONDUCTOR INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BOND STRENGTH (CHEMICAL); CHEMICAL BONDS; COMPLEXATION; HYDROGEN; IONS; IRRADIATION; QUANTUM CHEMISTRY; SILICON; SURFACE DEFECTS;

ION IRRADIATIONS; SI-H BONDS;

HYDROGEN BONDS;

EID: 51749096397 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2979686 Document Type: Article

Times cited : (22)

References (27)

1
- 0003864995
- edited by S. J. Pearton, J. W. Corbett, and M. Stavola (Springer, Berlin).
- Hydrogen in Crystalline Semiconductors, edited by, S. J. Pearton, J. W. Corbett, and, M. Stavola, (Springer, Berlin, 1992).
- (1992) Hydrogen in Crystalline Semiconductors

2
- 0000756527
- 0163-1829,. 10.1103/PhysRevB.59.12884
- B. Tuttle and C. G. Van de Walle, Phys. Rev. B 0163-1829 59, 12884 (1999). 10.1103/PhysRevB.59.12884
- (1999) Phys. Rev. B , vol.59 , pp. 12884
- Tuttle, B.¹ Van De Walle, C.G.²

3
- 0037120525
- 0031-9007,. 10.1103/PhysRevLett.88.125504
- J. R. Wells, R. E. I. Schropp, L. F. G. van der Meer, and J. I. Dijkhuis, Phys. Rev. Lett. 0031-9007 89, 125504 (2002). 10.1103/PhysRevLett.88.125504
- (2002) Phys. Rev. Lett. , vol.89 , pp. 125504
- Wells, J.R.¹ Schropp, R.E.I.² Van Der Meer, L.F.G.³ Dijkhuis, J.I.⁴

4
- 0001647307
- 0163-1829 10.1103/PhysRevB.61.10133.
- E. H. C. Ullersma, P. Ullersma, and F. H. P. M. Habraken, Phys. Rev. B 0163-1829 10.1103/PhysRevB.61.10133 61, 10133 (2000).
- (2000) Phys. Rev. B , vol.61 , pp. 10133
- Ullersma, E.H.C.¹ Ullersma, P.² Habraken, F.H.P.M.³

5
- 0000631883
- 0021-8979 10.1063/1.344116.
- M. E. Adel, O. Amir, R. Kalish, and L. C. Feldman, J. Appl. Phys. 0021-8979 10.1063/1.344116 66, 3248 (1989).
- (1989) J. Appl. Phys. , vol.66 , pp. 3248
- Adel, M.E.¹ Amir, O.² Kalish, R.³ Feldman, L.C.⁴

6
- 0001051382
- 0021-8979 10.1063/1.365871.
- M. P. de Jong, A. J. H. Maas, L. J. Van Ljzendoorn, S. S. Klein, and M. J. A. de Voigt, J. Appl. Phys. 0021-8979 10.1063/1.365871 82, 1058 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 1058
- De Jong, M.P.¹ Maas, A.J.H.² Van Ljzendoorn, L.J.³ Klein, S.S.⁴ De Voigt, M.J.A.⁵

7
- 0003412161
- (Pergamon, New York).
- J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
- (1985) The Stopping and Range of Ions in Solids
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

8
- 0342727389
- 1071-1023 10.1116/1.589416.
- M. K. Weldon, V. E. Marsico, Y. J. Chabal, A. Agarwal, D. J. Eaglesham, J. Sapjeta, W. L. Brown, D. C. Jacobson, Y. Caudano, S. B. Christman, and E. E. Chaban, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.589416 15, 1065 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 1065
- Weldon, M.K.¹ Marsico, V.E.² Chabal, Y.J.³ Agarwal, A.⁴ Eaglesham, D.J.⁵ Sapjeta, J.⁶ Brown, W.L.⁷ Jacobson, D.C.⁸ Caudano, Y.⁹ Christman, S.B.¹⁰ Chaban, E.E.¹¹

9
- 0001070560
- 0003-6951 10.1063/1.125606.
- J. Grisolia, G. Ben Assayag, A. Claverie, B. Aspar, C. Lagahe, and L. Laanab, Appl. Phys. Lett. 0003-6951 10.1063/1.125606 76, 852 (2000).
- (2000) Appl. Phys. Lett. , vol.76 , pp. 852
- Grisolia, J.¹ Ben Assayag, G.² Claverie, A.³ Aspar, B.⁴ Lagahe, C.⁵ Laanab, L.⁶

10
- 0032498769
- 0031-9007 10.1103/PhysRevLett.80.2177.
- C. G. Van de Walle, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.80. 2177 80, 2177 (1998).
- (1998) Phys. Rev. Lett. , vol.80 , pp. 2177
- Van De Walle, C.G.¹

11
- 0003987941
- (Academic, New York).
- L. C. Feldman, J. W. Mayer, and S. T. Picraux, Materials Analysis by Ion Channeling (Academic, New York, 1982).
- (1982) Materials Analysis by Ion Channeling
- Feldman, L.C.¹ Mayer, J.W.² Picraux, S.T.³

12
- 3943106733
- 0031-9007 10.1103/PhysRevLett.62.937.
- K. J. Chang and D. J. Chadi, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.62.937 62, 937 (1989).
- (1989) Phys. Rev. Lett. , vol.62 , pp. 937
- Chang, K.J.¹ Chadi, D.J.²

13
- 4244065232
- 0031-9007 10.1103/PhysRevLett.82.4870.
- F. A. Reboredo, M. Ferconi, and S. T. Pantelides, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.82.4870 82, 4870 (1999).
- (1999) Phys. Rev. Lett. , vol.82 , pp. 4870
- Reboredo, F.A.¹ Ferconi, M.² Pantelides, S.T.³

14
- 0017238329
- 0033-7579 10.1080/00337577608243025.
- E. Ligeon and A. Guivarc'h, Radiat. Eff. 0033-7579 10.1080/ 00337577608243025 27, 129 (1976).
- (1976) Radiat. Eff. , vol.27 , pp. 129
- Ligeon, E.¹ Guivarc'H, A.²

15
- 0034251928
- 0927-796X 10.1016/S0927-796X(00)00007-3.
- G. F. Cerofolini, F. Corni, S. Frabboni, C. Nobili, G. Ottaviani, and R. Tonini, Mater. Sci. Eng., R. 0927-796X 10.1016/S0927-796X(00)00007-3 27, 1 (2000).
- (2000) Mater. Sci. Eng., R. , vol.27 , pp. 1
- Cerofolini, G.F.¹ Corni, F.² Frabboni, S.³ Nobili, C.⁴ Ottaviani, G.⁵ Tonini, R.⁶

16
- 33846696383
- 0163-1829 10.1103/PhysRevB.75.075201.
- O. Moutanabbir, B. Terreault, M. Chicoine, F. Schiettekatte, and P. J. Simpson, Phys. Rev. B 0163-1829 10.1103/PhysRevB.75.075201 75, 075201 (2007).
- (2007) Phys. Rev. B , vol.75 , pp. 075201
- Moutanabbir, O.¹ Terreault, B.² Chicoine, M.³ Schiettekatte, F.⁴ Simpson, P.J.⁵

17
- 0002800045
- 0921-5107 10.1016/0921-5107(95)01260-5, ();, Phys. Rev. B 0163-1829 10.1103/PhysRevB.64.035204 64, 035204 (2001).
- B. Bech Nielsen, L. Hoffmann, and M. Budde, Mater. Sci. Eng., B 0921-5107 10.1016/0921-5107(95)01260-5 36, 259 (1996); E. V. Lavrov, J. Weber, L. Huang, and B. Bech Nielsen, Phys. Rev. B 0163-1829 10.1103/PhysRevB.64.035204 64, 035204 (2001).
- (1996) Mater. Sci. Eng., B , vol.36 , pp. 259
- Bech Nielsen, B.¹ Hoffmann, L.² Budde, M.³ Lavrov, E.V.⁴ Weber, J.⁵ Huang, L.⁶ Bech Nielsen, B.⁷

18
- 0030407686
- 0039-6028 10.1016/S0039-6028(96)01046-1.
- M. K. Weldon, V. E. Marsico, Y. J. Chabal, D. R. Hamann, S. B. Christman, and E. E. Chaban, Surf. Sci. 0039-6028 10.1016/S0039-6028(96)01046-1 368, 163 (1996).
- (1996) Surf. Sci. , vol.368 , pp. 163
- Weldon, M.K.¹ Marsico, V.E.² Chabal, Y.J.³ Hamann, D.R.⁴ Christman, S.B.⁵ Chaban, E.E.⁶

19
- 33947148827
- R. E. Johnson and W. L. Brown, Nucl. Instrum. Methods Phys. Res. 198, 103 (1982).
- (1982) Nucl. Instrum. Methods Phys. Res. , vol.198 , pp. 103
- Johnson, R.E.¹ Brown, W.L.²

20
- 0006632307
- 0003-6951 10.1063/1.105144.
- M. S. Brandt and M. Stutzmann, Appl. Phys. Lett. 0003-6951 10.1063/1.105144 58, 1620 (1991).
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1620
- Brandt, M.S.¹ Stutzmann, M.²

21
- 0000030766
- 0163-1829 10.1103/PhysRevB.52.R14320.
- C. G. Van de Walle and J. Neugebauer, Phys. Rev. B 0163-1829 10.1103/PhysRevB.52.R14320 52, R14320 (1995).
- (1995) Phys. Rev. B , vol.52 , pp. 14320
- Van De Walle, C.G.¹ Neugebauer, J.²

22
- 0001152889
- 0163-1829 10.1103/PhysRevB.49.4579.
- C. G. Van de Walle, Phys. Rev. B 0163-1829 10.1103/PhysRevB.49.4579 49, 4579 (1994).
- (1994) Phys. Rev. B , vol.49 , pp. 4579
- Van De Walle, C.G.¹

23
- 0001367010
- 0163-1829 10.1103/PhysRevB.49.17040.
- M. A. Roberson and S. K. Estreicher, Phys. Rev. B 0163-1829 10.1103/PhysRevB.49.17040 49, 17040 (1994).
- (1994) Phys. Rev. B , vol.49 , pp. 17040
- Roberson, M.A.¹ Estreicher, S.K.²

24
- 0030290197
- 0254-0584 10.1016/S0254-0584(97)80014-4.
- C. H. M. Maŕe, A. M. Vredenberg, and F. H. P. M. Habraken, Mater. Chem. Phys. 0254-0584 10.1016/S0254-0584(97)80014-4 46, 198 (1996).
- (1996) Mater. Chem. Phys. , vol.46 , pp. 198
- Maŕe, C.H.M.¹ Vredenberg, A.M.² Habraken, F.H.P.M.³

25
- 0020547939
- 0021-8979 10.1063/1.331728.
- G. S. Oehrlein, I. Krafcsik, J. L. Lindström, A. E. Jaworowski, and J. W. Corbett, J. Appl. Phys. 0021-8979 10.1063/1.331728 54, 179 (1983).
- (1983) J. Appl. Phys. , vol.54 , pp. 179
- Oehrlein, G.S.¹ Krafcsik, I.² Lindström, J.L.³ Jaworowski, A.E.⁴ Corbett, J.W.⁵

26
- 29744433637
- 0163-1829 10.1103/PhysRevB.72.201202, (R).
- J. G. Swadener, M. I. Baskes, and M. Nastasi, Phys. Rev. B 0163-1829 10.1103/PhysRevB.72.201202 72, 201202 (R) (2005).
- (2005) Phys. Rev. B , vol.72 , pp. 201202
- Swadener, J.G.¹ Baskes, M.I.² Nastasi, M.³

27
- 0345072492
- 0921-5107 10.1016/S0921-5107(98)00270-0.
- S. K. Estreicher, J. L. Hastings, and P. A. Fedders, Mater. Sci. Eng., B 0921-5107 10.1016/S0921-5107(98)00270-0 58, 31 (1999).
- (1999) Mater. Sci. Eng., B , vol.58 , pp. 31
- Estreicher, S.K.¹ Hastings, J.L.² Fedders, P.A.³

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