Flexible SiO2 cantilevers for torsional self-aligning micro scale four-point probes

Journal of Micromechanics and Microengineering

Volumn 17, Issue 9, 2007, Pages 1910-1915

  Kjaer D ^a   Gammelgaard, L ^b   Boggild P ^b   Hansen, O ^b   Petersen, P R E ^a   Hansen, J E ^a  

^a Capres AS   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT AREAS; CONTACT PRESSURES; FOUR-POINT PROBE;

PHOTOLITHOGRAPHY;

EID: 51649083263     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/9/020     Document Type: Conference Paper

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