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Volumn , Issue , 2008, Pages 150-152

Investigation of interconnect design on chip package interaction and mechanical reliability of Cu/low-k multi-layer interconnects in flip chip package

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER NETWORKS; CRACK PROPAGATION; DIELECTRIC MATERIALS; FLOW INTERACTIONS; RELIABILITY ANALYSIS;

EID: 50949083158     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2008.4546952     Document Type: Conference Paper
Times cited : (9)

References (12)
  • 1
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    • Full Copper Wiring in a sub-0.25μm CMOS ULSI Technology
    • Dec, Int. Technical Digest
    • D. Edelstein, et. al., "Full Copper Wiring in a sub-0.25μm CMOS ULSI Technology", Electron Dev. Meeting, pp. 773-776, Dec 1997 [Int. Technical Digest, 1997].
    • (1997) Electron Dev. Meeting , pp. 773-776
    • Edelstein, D.1    et., al.2
  • 2
    • 84886448141 scopus 로고    scopus 로고
    • A High Performance 1.8V, 0.2μm CMOS Technology with Copper Metallization
    • Dec, Int. Technical Digest
    • S. Venkatesan, et. al., "A High Performance 1.8V, 0.2μm CMOS Technology with Copper Metallization", Electron Dev. Meeting, pp. 769-772, Dec 1997 [Int. Technical Digest, 1997].
    • (1997) Electron Dev. Meeting , pp. 769-772
    • Venkatesan, S.1    et., al.2
  • 3
    • 84961755707 scopus 로고    scopus 로고
    • Evaluation and Analysis for Mechanical Strengths of Low k Dielectrics by a Finite Element Method
    • N. Aoi, T. Fukuda and H. Yanazawa, "Evaluation and Analysis for Mechanical Strengths of Low k Dielectrics by a Finite Element Method", in Proc. IEEE 2002 Int. Interconnect Technol. Conf., 2002, pp. 72-74.
    • (2002) Proc. IEEE 2002 Int. Interconnect Technol. Conf , pp. 72-74
    • Aoi, N.1    Fukuda, T.2    Yanazawa, H.3
  • 6
    • 0742303701 scopus 로고    scopus 로고
    • Impact of Flip-Chip Packaging on Copper/Low-k Structures
    • November
    • Lei L. Mercado, S-M. Kuo, C. Goldberg and D. Frear, "Impact of Flip-Chip Packaging on Copper/Low-k Structures", IEEE Trans. Adv. Packaging, vol. 26, pp. 433-440, November 2003.
    • (2003) IEEE Trans. Adv. Packaging , vol.26 , pp. 433-440
    • Mercado, L.L.1    Kuo, S.-M.2    Goldberg, C.3    Frear, D.4
  • 7
    • 28244455277 scopus 로고    scopus 로고
    • 45nm-Node BEOL Integration Featuring Porous-Ultra-Low-K/Cu Multilevel Interconnects
    • I. Sugiura, et. al., "45nm-Node BEOL Integration Featuring Porous-Ultra-Low-K/Cu Multilevel Interconnects", in Proc. IEEE 2002 Int. Interconnect Technol. Conf., 2005, pp. 15-17.
    • (2005) Proc. IEEE 2002 Int. Interconnect Technol. Conf , pp. 15-17
    • Sugiura, I.1    et., al.2
  • 8
    • 41749124022 scopus 로고    scopus 로고
    • Effects of Chip-Package Interaction on Mechanical Reliability of Cu Interconnects for 65nm Technology Node and Beyond
    • C. J. Uchibori, Xuefeng Zhang, P. S. Ho and T. Nakamura, "Effects of Chip-Package Interaction on Mechanical Reliability of Cu Interconnects for 65nm Technology Node and Beyond", in Proc. IEEE Int. Interconnect Tech. Conf., 2006, pp. 196-198.
    • (2006) Proc. IEEE Int. Interconnect Tech. Conf , pp. 196-198
    • Uchibori, C.J.1    Zhang, X.2    Ho, P.S.3    Nakamura, T.4
  • 9
    • 33751254086 scopus 로고    scopus 로고
    • Chip-Packaging Interaction and Reliability Impact on Cu/Low k Interconnects
    • Proc. Inter. Stress Workshop
    • G. T. Wang, X. F. Zhang and P. S. Ho, "Chip-Packaging Interaction and Reliability Impact on Cu/Low k Interconnects", in Proc. Inter. Stress Workshop, AIP Conf. Proc. Series, Vol. 817, 2005, pp.73-82.
    • (2005) AIP Conf. Proc. Series , vol.817 , pp. 73-82
    • Wang, G.T.1    Zhang, X.F.2    Ho, P.S.3
  • 10
    • 0141940242 scopus 로고    scopus 로고
    • Thin Film Cracking Modulated by Underlayer Creep, Experiment
    • J. Liang, R. Huang, J. H. Prevost and Z. Suo, "Thin Film Cracking Modulated by Underlayer Creep", Experiment. Mechanics, 43, 2003, pp. 269-279.
    • (2003) Mechanics , vol.43 , pp. 269-279
    • Liang, J.1    Huang, R.2    Prevost, J.H.3    Suo, Z.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.