메뉴 건너뛰기




Volumn 100, Issue 6, 2006, Pages

Molybdenum angular sputtering distribution under low energy xenon ion bombardment

Author keywords

[No Author keywords available]

Indexed keywords

COSINE DISTRIBUTION; ION ENERGY; MONTE CARLO CODE; QUADRUPOLE MASS SPECTROMETER (QMS);

EID: 33749367948     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2336502     Document Type: Article
Times cited : (21)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.