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Volumn 100, Issue 6, 2006, Pages
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Molybdenum angular sputtering distribution under low energy xenon ion bombardment
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Author keywords
[No Author keywords available]
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Indexed keywords
COSINE DISTRIBUTION;
ION ENERGY;
MONTE CARLO CODE;
QUADRUPOLE MASS SPECTROMETER (QMS);
ATOMS;
ION BOMBARDMENT;
MASS SPECTROMETERS;
MONTE CARLO METHODS;
SPUTTERING;
XENON;
MOLYBDENUM;
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EID: 33749367948
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2336502 Document Type: Article |
Times cited : (21)
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References (18)
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