Sputtering mechanisms near the threshold energy

Journal of Nuclear Materials

Volumn 328, Issue 1, 2004, Pages 55-61

  Eckstein, W ^a   Roth, J ^a   Nagel, W ^a   Dohmen, R ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; COMPUTER SIMULATION; ION BOMBARDMENT; PARALLEL PROCESSING SYSTEMS; PROJECTILES; REFRACTION; SPUTTERING; TARGETS;

MASS RATIOS; RECOIL PRODUCTION; REPLACEMENT COLLISIONS; THRESHOLD ENERGIES;

NUCLEAR ENERGY;

EID: 2642572811     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnucmat.2004.03.010     Document Type: Article

References (11)

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6. Wilson W.D., Haggmark L.G., Biersack J.P. Phys. Rev. B. 15:1977;2458.
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