Carbon sputtering yield measurements at grazing incidence

Applied Surface Science

Volumn 254, Issue 8, 2008, Pages 2506-2515

  Kolasinski, Robert D ^a   Polk, James E ^b   Goebel, Dan ^b   Johnson, Lee K ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Carbon; Ion beam; QCM; Sputtering; Thin film

Indexed keywords

ANGLE MEASUREMENT; ION BEAMS; QUARTZ CRYSTAL MICROBALANCES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS;

CARBON SPUTTERING; ENERGY ION BEAM; MATERIAL PROPERTIES;

CARBON;

EID: 38749107039     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.09.082     Document Type: Article

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