Fabrication of metallic nanopatterns using the vacuum type UV-NIL equipment

IEEJ Transactions on Electrical and Electronic Engineering

Volumn 2, Issue 3, 2007, Pages 307-312

  Fukuhara, Makoto ^a   Mizuno, Jun ^a   Saito, Mikiko ^a   Homma, Takayuki ^a   Shoji, Shuichi ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Electrodeposition; Metallic nanopatterns; Nanoimprint; Photocurable resin; Vacuum type

Indexed keywords

COBALT ALLOYS; ELECTRODEPOSITION; NANOIMPRINT LITHOGRAPHY; PATTERN RECOGNITION;

METALLIC NANOPATTERNS; PHOTOCURABLE RESIN;

NANOSTRUCTURED MATERIALS;

ALLOY; COBALT; ELECTROPLATING; LITHOGRAPHY; PATTERN RECOGNITION;

EID: 34248196578     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20159     Document Type: Article

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