UV nanoimprint lithography and its application for nanodevices

Journal of Photopolymer Science and Technology

Volumn 20, Issue 4, 2007, Pages 549-554

  Fukuhara, Makoto ^a   Ono, Hiroshi ^a   Hirasawa, Tamano ^b   Otaguchi, Makoto ^b   Sakai, Nobuji ^b   Mizuno, Jun ^a   Shoji, Shuichi ^a  

^a WASEDA UNIVERSITY   (Japan)

^b TOYO GOSEI CO LTD   (Japan)

Author keywords

Electrodeposition; LED; Magnetic dot array; UV nanoimprint

Indexed keywords

EID: 37549016064     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.20.549     Document Type: Article

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