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Volumn 36, Issue 4 PART 2, 2008, Pages 1589-1599

Negative-ion-source modeling: From expansion to extraction region

Author keywords

Ion source; Modeling; Monte Carlo methods

Indexed keywords

ION SOURCE; MODELING; MONTE CARLO METHODS; SOURCE MODELING; VIBRATIONAL KINETICS;

EID: 50649113689     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2008.927380     Document Type: Article
Times cited : (30)

References (50)
  • 2
    • 33744787596 scopus 로고    scopus 로고
    • Overview of the RF source development programme at IPP Garching
    • Jun
    • E. Speth, H. D. Falter, and P. Franzen et al., "Overview of the RF source development programme at IPP Garching," Nucl. Fusion, vol. 46, no. 6, pp. S220-S238, Jun. 2006.
    • (2006) Nucl. Fusion , vol.46 , Issue.6
    • Speth, E.1    Falter, H.D.2    Franzen, P.3
  • 3
    • 33744807973 scopus 로고    scopus 로고
    • Physics aspects of negative ion sources
    • Jun
    • M. Bacal, "Physics aspects of negative ion sources," Nucl. Fusion vol. 46, no. 6, pp. S250-S259, Jun. 2006.
    • (2006) Nucl. Fusion , vol.46 , Issue.6
    • Bacal, M.1
  • 5
    • 50649105461 scopus 로고    scopus 로고
    • M. Bandyopadhyay, Studies of an inductively coupled negative hydrogen ion radio frequency source through simulations and experiments, Ph.D. dissertations, Technische Universitat Munchen, Max-Planck-Institut fur Plasmaphysik, Garching, Germany, 2004.
    • M. Bandyopadhyay, "Studies of an inductively coupled negative hydrogen ion radio frequency source through simulations and experiments," Ph.D. dissertations, Technische Universitat Munchen, Max-Planck-Institut fur Plasmaphysik, Garching, Germany, 2004.
  • 8
    • 33747032924 scopus 로고    scopus 로고
    • Coupled rotational-vibrational relaxation of molecular hydrogen at high temperatures
    • vo
    • M. Furudate, K. Fujita, and T. Abe, "Coupled rotational-vibrational relaxation of molecular hydrogen at high temperatures," J. Thermophys. Heat Transf., vo. 20, no. 3, pp. 457-464, 2006.
    • (2006) J. Thermophys. Heat Transf , vol.20 , Issue.3 , pp. 457-464
    • Furudate, M.1    Fujita, K.2    Abe, T.3
  • 9
    • 0001359573 scopus 로고    scopus 로고
    • Cross section data for electron-impact inelastic processes of vibrationally excited molecules of hydrogen and its isotopes
    • Mar
    • R. Celiberto, R. K. Janev, A. Laricchiuta, M. Capitelli, J. M.Wadehra, and D. E. Atems, "Cross section data for electron-impact inelastic processes of vibrationally excited molecules of hydrogen and its isotopes," At. Data Nucl. Data Tables, vol. 77, no. 2, pp. 161-213, Mar. 2001.
    • (2001) At. Data Nucl. Data Tables , vol.77 , Issue.2 , pp. 161-213
    • Celiberto, R.1    Janev, R.K.2    Laricchiuta, A.3    Capitelli, M.4    Wadehra, J.M.5    Atems, D.E.6
  • 10
    • 0036147799 scopus 로고    scopus 로고
    • Towards a cross section database of excited atomic and molecular hydrogen
    • R. Celiberto, M. Capitelli, and A. Laricchiuta, "Towards a cross section database of excited atomic and molecular hydrogen," Phys. Scr., vol. T96, pp. 32-44, 2002.
    • (2002) Phys. Scr , vol.T96 , pp. 32-44
    • Celiberto, R.1    Capitelli, M.2    Laricchiuta, A.3
  • 13
    • 0037469385 scopus 로고    scopus 로고
    • Elastic processes involving vibrationally excited molecules in cold hydrogen plasmas
    • Jan, Online, Available
    • P. S. Krstić and D. R. Schultz, "Elastic processes involving vibrationally excited molecules in cold hydrogen plasmas," J. Phys. B, At. Mol. Opt. Phys., vol. 36, no. 2, pp. 385-398, Jan. 2003. [Online]. Available: http://www-cfadc.phy.ornl.gov
    • (2003) J. Phys. B, At. Mol. Opt. Phys , vol.36 , Issue.2 , pp. 385-398
    • Krstić, P.S.1    Schultz, D.R.2
  • 14
    • 0036149852 scopus 로고    scopus 로고
    • Charge transfer processes in slow collisions of protons with vibrationally excited hydrogen molecules
    • Online, Available
    • P. S. Krstić, D. R. Schultz, and R. K. Janev, "Charge transfer processes in slow collisions of protons with vibrationally excited hydrogen molecules," Phys. Scr., vol. T96, pp. 61-71, 2002. [Online]. Available: http://wwwcfadc.phy.ornl.gov
    • (2002) Phys. Scr , vol.T96 , pp. 61-71
    • Krstić, P.S.1    Schultz, D.R.2    Janev, R.K.3
  • 15
    • 0036818750 scopus 로고    scopus 로고
    • + collisions: Excitations and charge transfer
    • Online, Available
    • + collisions: Excitations and charge transfer," Phys. Rev. A, Gen. Phys., vol. 66, no. 4, p. 042 717, 2002. [Online]. Available: http://www-cfadc.phy.ornl.gov
    • (2002) Phys. Rev. A, Gen. Phys , vol.66 , Issue.4 , pp. 042-717
    • Krstić, P.S.1
  • 16
    • 0038302769 scopus 로고    scopus 로고
    • 2+ collisions. II. Dissociation, Phys. Rev. A, Gen. Phys., 67, no. 2, p. 022 708, 2003. see also http://www-cfadc.phy.ornl.gov.
    • 2+ collisions. II. Dissociation," Phys. Rev. A, Gen. Phys., vol. 67, no. 2, p. 022 708, 2003. see also http://www-cfadc.phy.ornl.gov.
  • 17
    • 0005317021 scopus 로고    scopus 로고
    • Dynamical calculations of state-to-state and dissociation cross sections for atom-molecule collision processes in hydrogen
    • F. Esposito and M. Capitelli, "Dynamical calculations of state-to-state and dissociation cross sections for atom-molecule collision processes in hydrogen," At. Plasma-Mater. Interact. Data Fusion, vol. 9, pp. 65-73, 2001.
    • (2001) At. Plasma-Mater. Interact. Data Fusion , vol.9 , pp. 65-73
    • Esposito, F.1    Capitelli, M.2
  • 19
    • 0034197672 scopus 로고    scopus 로고
    • Probability theory of electron-molecule, ion-molecule, molecule-molecule, and Coulomb collisions for particle modeling of materials processing plasmas and gases
    • Jun
    • K. Nanbu, "Probability theory of electron-molecule, ion-molecule, molecule-molecule, and Coulomb collisions for particle modeling of materials processing plasmas and gases," IEEE Trans. Plasma Sci., vol. 28, no. 3, pp. 971-990, Jun. 2000.
    • (2000) IEEE Trans. Plasma Sci , vol.28 , Issue.3 , pp. 971-990
    • Nanbu, K.1
  • 22
    • 0342874305 scopus 로고    scopus 로고
    • Eley-Rideal and hot-atom reactions of H(D) atoms with D(H)-covered Cu(111) surfaces; quasiclassical studies
    • 038-11046
    • D. Shalashilin, B. Jackson, and M. Persson, "Eley-Rideal and hot-atom reactions of H(D) atoms with D(H)-covered Cu(111) surfaces; quasiclassical studies," J. Chem. Phys., vol. 110, no. 22, pp. 11 038-11046, 1999.
    • (1999) J. Chem. Phys , vol.110 , Issue.22 , pp. 11
    • Shalashilin, D.1    Jackson, B.2    Persson, M.3
  • 24
    • 0012627905 scopus 로고
    • 2 vibrational distribution in a hydrogen discharge
    • 2 vibrational distribution in a hydrogen discharge," Appl. Phys. Lett., vol. 54, no. 6, pp. 508-510, 1989.
    • (1989) Appl. Phys. Lett , vol.54 , Issue.6 , pp. 508-510
    • Hiskes, J.R.1    Karo, A.M.2
  • 25
    • 0022146031 scopus 로고
    • Reflection of low-energy hydrogen from solids
    • W. Eckstein and J. P. Biersack, "Reflection of low-energy hydrogen from solids," Appl. Phys. A, vol. 38, no. 2, pp. 123-129, 1985.
    • (1985) Appl. Phys. A , vol.38 , Issue.2 , pp. 123-129
    • Eckstein, W.1    Biersack, J.P.2
  • 26
    • 0035882575 scopus 로고    scopus 로고
    • Non-equilibrium vibrational kinetics and 'hot atom' models in the recombination of hydrogen atoms on surfaces
    • Aug
    • E. Molinari and M. Tomellini, "Non-equilibrium vibrational kinetics and 'hot atom' models in the recombination of hydrogen atoms on surfaces," Chem. Phys., vol. 270, no. 3, pp. 439-458, Aug. 2001.
    • (2001) Chem. Phys , vol.270 , Issue.3 , pp. 439-458
    • Molinari, E.1    Tomellini, M.2
  • 27
    • 0035151618 scopus 로고    scopus 로고
    • Eley-Rideal reactions between H atoms on metal and graphite surfaces: The variation of reactivity with substrate
    • B. Jackson and D. Lemoine, "Eley-Rideal reactions between H atoms on metal and graphite surfaces: The variation of reactivity with substrate," J. Chem. Phys., vol. 114, no. 1, pp. 474-482, 2001.
    • (2001) J. Chem. Phys , vol.114 , Issue.1 , pp. 474-482
    • Jackson, B.1    Lemoine, D.2
  • 28
    • 0011865651 scopus 로고
    • Vibrational excitation of hydrogen via recombinative desorption of atomic hydrogen gas on a metal surface
    • R. I. Hall, I. Čadež, M. Landau, F. Pichou, and C. Schermann, "Vibrational excitation of hydrogen via recombinative desorption of atomic hydrogen gas on a metal surface," Phys. Rev. Lett., vol. 60, no. 4, pp. 337-340, 1988.
    • (1988) Phys. Rev. Lett , vol.60 , Issue.4 , pp. 337-340
    • Hall, R.I.1    Čadež, I.2    Landau, M.3    Pichou, F.4    Schermann, C.5
  • 29
    • 0011774075 scopus 로고
    • Observation of exceptionally high vibrational excitation of hydrogenmolecules formed by wall recombination
    • P. J. Eenshuistra, J. H.M. Bonnie, J. Los, and H. J. Hopman, "Observation of exceptionally high vibrational excitation of hydrogenmolecules formed by wall recombination," Phys. Rev. Lett. vol. 60, no. 4, pp. 341-344, 1988.
    • (1988) Phys. Rev. Lett , vol.60 , Issue.4 , pp. 341-344
    • Eenshuistra, P.J.1    Bonnie, J.H.M.2    Los, J.3    Hopman, H.J.4
  • 30
    • 0013333129 scopus 로고
    • 2(v″): Negative-ion formation on low-work- function surfaces
    • 2(v″): Negative-ion formation on low-work- function surfaces," J. Appl. Phys., vol. 67, no. 11, pp. 6621-6632, 1990.
    • (1990) J. Appl. Phys , vol.67 , Issue.11 , pp. 6621-6632
    • Hiskes, J.R.1    Karo, A.M.2
  • 31
    • 33744831155 scopus 로고    scopus 로고
    • Atom and ion chemistry in low pressure hydrogen DC plasmas
    • I. Méndez, F. J. Gordillo-Vźquez, V. J. Herrero, and I. Tanarro, "Atom and ion chemistry in low pressure hydrogen DC plasmas," J. Phys. Chem. A, vol. 110, no. 18, pp. 6060-6066, 2006.
    • (2006) J. Phys. Chem. A , vol.110 , Issue.18 , pp. 6060-6066
    • Méndez, I.1    Gordillo-Vźquez, F.J.2    Herrero, V.J.3    Tanarro, I.4
  • 32
    • 34547573660 scopus 로고    scopus 로고
    • Modeling of a negative ion source I. Gas kinetics and dynamics in the expansion region
    • F. Taccogna, R. Schneider, S. Longo, and M. Capitelli, "Modeling of a negative ion source I. Gas kinetics and dynamics in the expansion region," Phys. Plasmas, vol. 14, no. 7, p. 073 503, 2007.
    • (2007) Phys. Plasmas , vol.14 , Issue.7 , pp. 073-503
    • Taccogna, F.1    Schneider, R.2    Longo, S.3    Capitelli, M.4
  • 33
    • 2342650025 scopus 로고    scopus 로고
    • Effects of a weak transverse magnetic field on negative ion transport in negative ion source
    • T. Sakurabayashi, A. Hatayama, and M. Bacal, "Effects of a weak transverse magnetic field on negative ion transport in negative ion source," J. Appl. Phys., vol. 95, no. 8, pp. 3937-3942, 2004.
    • (2004) J. Appl. Phys , vol.95 , Issue.8 , pp. 3937-3942
    • Sakurabayashi, T.1    Hatayama, A.2    Bacal, M.3
  • 34
    • 33751223506 scopus 로고    scopus 로고
    • Influence of transversal magnetic field on negative ion extraction process in 3D computer simulation of the multi-aperture ion source
    • M. Turek, J. Sielanko, P. Franzen, and E. Speth, "Influence of transversal magnetic field on negative ion extraction process in 3D computer simulation of the multi-aperture ion source," in Proc. Int. Conf. Plasma, 2006, vol. 812, pp. 153-156.
    • (2006) Proc. Int. Conf. Plasma , vol.812 , pp. 153-156
    • Turek, M.1    Sielanko, J.2    Franzen, P.3    Speth, E.4
  • 35
    • 34047138075 scopus 로고    scopus 로고
    • Influence of magnetic fields and biasing on the plasma of a RF driven negative ion source
    • M. P. Stockli, Ed. New York: Amer. Inst. Phys
    • D.Wunderlich, R. Gutser, and U. Fantz, "Influence of magnetic fields and biasing on the plasma of a RF driven negative ion source," in Proc. 11th Int. Symp. Prod. Neutralization Negative Ions Beams, M. P. Stockli, Ed. New York: Amer. Inst. Phys., 2007, vol. 925, pp. 46-57.
    • (2007) Proc. 11th Int. Symp. Prod. Neutralization Negative Ions Beams , vol.925 , pp. 46-57
    • Wunderlich, D.1    Gutser, R.2    Fantz, U.3
  • 36
    • 0008364407 scopus 로고
    • - ions optimized by plasma grid potential and plasma parameters in a bucket source
    • - ions optimized by plasma grid potential and plasma parameters in a bucket source," Rev. Sci. Instrum., vol. 63, no. 4, pp. 2696-2698, 1992.
    • (1992) Rev. Sci. Instrum , vol.63 , Issue.4 , pp. 2696-2698
    • Fukumasa, O.1    Hosoda, M.2    Naitou, H.3
  • 37
    • 33645826558 scopus 로고    scopus 로고
    • - density near a plasma grid of a negative ion source
    • - density near a plasma grid of a negative ion source," Rev. Sci. Instrum., vol. 77, no. 3, p. 03A 513, 2006.
    • (2006) Rev. Sci. Instrum , vol.77 , Issue.3
    • Takahashi, H.1    Kasuya, T.2    Wada, M.3
  • 38
    • 33645834980 scopus 로고    scopus 로고
    • - extraction
    • - extraction," Rev. Sci. Instrum., vol. 77, no. 3, p. 03A 504, 2006.
    • (2006) Rev. Sci. Instrum , vol.77 , Issue.3
    • Becker, R.1
  • 39
    • 0342501696 scopus 로고    scopus 로고
    • Modeling of negative ion transport in a plasma source
    • D. Riz and J. Paméla, "Modeling of negative ion transport in a plasma source," Rev. Sci. Instrum., vol. 69, no. 2, pp. 914-919, 1998.
    • (1998) Rev. Sci. Instrum , vol.69 , Issue.2 , pp. 914-919
    • Riz, D.1    Paméla, J.2
  • 41
    • 0029632851 scopus 로고
    • A Monte Carlo collision model for the particle-in-cell method: Applications to argon and oxygen discharges
    • V. Vahedi and M. Surendra, "A Monte Carlo collision model for the particle-in-cell method: Applications to argon and oxygen discharges," Comput. Phys. Commun., vol. 87, no. 1, pp. 179-198, 1995.
    • (1995) Comput. Phys. Commun , vol.87 , Issue.1 , pp. 179-198
    • Vahedi, V.1    Surendra, M.2
  • 42
    • 0005466407 scopus 로고    scopus 로고
    • - detachment function: I. The classical-dynamic study, J. Phys. B, At. Mol. Opt. Phys., 31, no. 11, pp. 2611-2631, 1998.
    • - detachment function: I. The classical-dynamic study," J. Phys. B, At. Mol. Opt. Phys., vol. 31, no. 11, pp. 2611-2631, 1998.
  • 43
    • 0348084429 scopus 로고
    • Resonant charge transfer in the scattering of hydrogen atoms from a metal surface
    • H. L. Cui, "Resonant charge transfer in the scattering of hydrogen atoms from a metal surface," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 9, no. 3, pp. 1823-1827, 1991.
    • (1991) J. Vac. Sci. Technol. A, Vac. Surf. Films , vol.9 , Issue.3 , pp. 1823-1827
    • Cui, H.L.1
  • 44
  • 45
    • 0016993776 scopus 로고
    • Mechanism for negative-ion production in the surface-plasma negative-ion source
    • J. R. Hiskes, A. Karo, and M. Gardner, "Mechanism for negative-ion production in the surface-plasma negative-ion source," J. Appl. Phys., vol. 47, no. 9, pp. 3888-3896, 1976.
    • (1976) J. Appl. Phys , vol.47 , Issue.9 , pp. 3888-3896
    • Hiskes, J.R.1    Karo, A.2    Gardner, M.3
  • 46
    • 4043061070 scopus 로고
    • Surface negative ion production in ion sources
    • Y. Belchenko, "Surface negative ion production in ion sources," Rev. Sci. Instrum., vol. 64, no. 6, pp. 1385-1393, 1993.
    • (1993) Rev. Sci. Instrum , vol.64 , Issue.6 , pp. 1385-1393
    • Belchenko, Y.1
  • 48
    • 30444457835 scopus 로고    scopus 로고
    • Effects of transverse magnetic field and spatial potential on negative transport in negative ion source
    • New York: Amer. Inst. Phys
    • T. Sakurabayashi, A. Hatayama, and M. Bacal, "Effects of transverse magnetic field and spatial potential on negative transport in negative ion source," in Proc. 10th Int. Symp. Prod. Neutralization Negative Ions Beams. New York: Amer. Inst. Phys., 2004, vol. 763, pp. 96-106.
    • (2004) Proc. 10th Int. Symp. Prod. Neutralization Negative Ions Beams , vol.763 , pp. 96-106
    • Sakurabayashi, T.1    Hatayama, A.2    Bacal, M.3
  • 49
    • 36549094993 scopus 로고
    • Method for extracting volume produced negative ions
    • M. Bacal, J. Bruneteau, and P. Devynck, "Method for extracting volume produced negative ions," Rev. Sci. Instrum., vol. 59, no. 10, pp. 2152-2157, 1988.
    • (1988) Rev. Sci. Instrum , vol.59 , Issue.10 , pp. 2152-2157
    • Bacal, M.1    Bruneteau, J.2    Devynck, P.3


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