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Volumn 925, Issue , 2007, Pages 46-57
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Influence of magnetic fields and biasing on the plasma of a RF driven negative ion source
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Author keywords
Monte Carlo methods; Particle orbit and trajectory; Particle in cell; Plasma simulation
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Indexed keywords
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EID: 34047138075
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.2773645 Document Type: Conference Paper |
Times cited : (18)
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References (18)
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