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Volumn 925, Issue , 2007, Pages 20-30
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Study of volume and surface effects in pure hydrogen discharges
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Author keywords
PIC MCC model; RF inductive negative ion source
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Indexed keywords
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EID: 36349019096
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.2773642 Document Type: Conference Paper |
Times cited : (3)
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References (22)
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