TiO2 thin films as sensing gas materials

Journal of Non-Crystalline Solids

Volumn 354, Issue 35-39, 2008, Pages 4396-4400

  Mardare, D ^a   Iftimie, N ^a,b   Luca, D ^a  

^a ALEXANDRU IOAN CUZA UNIVERSITY OF IASI   (Romania)

^b NATIONAL INSTITUTE OF RESEARCH AND DEVELOPMENT FOR TECHNICAL PHYSICS   (Romania)

Author keywords

Sensors

Indexed keywords

ACETONE; FILM PREPARATION; GLASS; LIQUEFIED PETROLEUM GAS; OXIDE MINERALS; QUARTZ; SENSORS; SUBSTRATES; TITANIUM DIOXIDE; VAPOR DEPOSITION; WATER VAPOR; X RAY DIFFRACTION;

DC REACTIVE MAGNETRON SPUTTERING; DEPOSITION CONDITIONS; GLASS SUBSTRATES; OPERATING TEMPERATURE; QUARTZ SUBSTRATE; RUTILE AND ANATASE; TITANIUM DIOXIDE FILMS; WATER VAPOR ATMOSPHERE;

THIN FILMS;

EID: 50649099451     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2008.06.058     Document Type: Article

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