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Volumn 507-510, Issue , 2002, Pages 468-472
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On the structure, morphology and electrical conductivities of titanium oxide thin films
a
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Author keywords
Atomic force microscopy; Electrical transport measurements; Polycrystalline thin films; Semiconducting films; Titanium oxide
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Indexed keywords
ACTIVATION ENERGY;
ATOMIC FORCE MICROSCOPY;
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC CONDUCTIVITY;
ELECTRIC SPACE CHARGE;
MORPHOLOGY;
PHASE COMPOSITION;
SEMICONDUCTING FILMS;
SPUTTER DEPOSITION;
THIN FILMS;
TITANIUM DIOXIDE;
X RAY DIFFRACTION ANALYSIS;
SPUTTERED THIN FILMS;
SURFACE STRUCTURE;
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EID: 0036608946
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(02)01287-6 Document Type: Conference Paper |
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Times cited : (71)
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References (16)
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