메뉴 건너뛰기




Volumn 52, Issue 9, 2008, Pages 1374-1381

Finite element analysis and analytical simulations of Suspended Gate-FET for ultra-low power inverters

Author keywords

Computational modeling and simulation; Low power; MEMS NEMS; Micro electro mechanical switch; Suspended Gate Field Effect Transistor

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MESFET DEVICES;

EID: 50349099929     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2008.04.013     Document Type: Article
Times cited : (18)

References (16)
  • 2
    • 33947248679 scopus 로고    scopus 로고
    • 3D design and analysis of functional NEMS-gate MOSFETs and SETs
    • Pruvost B., Mizuta H., and Oda S. 3D design and analysis of functional NEMS-gate MOSFETs and SETs. IEEE Trans Nanotechnol 6 2 (2007) 218-224
    • (2007) IEEE Trans Nanotechnol , vol.6 , Issue.2 , pp. 218-224
    • Pruvost, B.1    Mizuta, H.2    Oda, S.3
  • 3
    • 33847746657 scopus 로고    scopus 로고
    • A new nano-electro-mechanical field effect transistor (NEMFET) design for low-power electronics
    • IEEE International
    • Kam H., Lee D., Howe R., and King T.-J. A new nano-electro-mechanical field effect transistor (NEMFET) design for low-power electronics. Electron Devices Meeting, 2005. IEDM Technical Digest (2005), IEEE International 463-466
    • (2005) Electron Devices Meeting, 2005. IEDM Technical Digest , pp. 463-466
    • Kam, H.1    Lee, D.2    Howe, R.3    King, T.-J.4
  • 4
    • 49549122930 scopus 로고    scopus 로고
    • Colinet E, Durand C, Audebert P, Renaux P, Mercier D, Duraffourg L, et al. Measurement of nano displacement based on in-plane suspended gate MOSFET detection compatible with front-end CMOS process. In: IEEE international conference on solid-state circuits (ISSCC); 2008. p. 332-3.
    • Colinet E, Durand C, Audebert P, Renaux P, Mercier D, Duraffourg L, et al. Measurement of nano displacement based on in-plane suspended gate MOSFET detection compatible with front-end CMOS process. In: IEEE international conference on solid-state circuits (ISSCC); 2008. p. 332-3.
  • 5
    • 33845576089 scopus 로고    scopus 로고
    • Principles of space-charge based bi-stable MEMS: the junction-MEMS
    • Sallese J.-M., and Bouvet D. Principles of space-charge based bi-stable MEMS: the junction-MEMS. Sens Actuator A: Phys 133 1 (2007) 173-179
    • (2007) Sens Actuator A: Phys , vol.133 , Issue.1 , pp. 173-179
    • Sallese, J.-M.1    Bouvet, D.2
  • 6
    • 50049111826 scopus 로고    scopus 로고
    • Grogg D, Tsamados D, Badila N-D, Ionescu AM. Integration of MOSFET transistors in MEMS resonators for improved output detection. In: Solid-state sensors, actuators and microsystems conference, 2007. TRANSDUCERS 2007. International; 2007. p. 1709-12.
    • Grogg D, Tsamados D, Badila N-D, Ionescu AM. Integration of MOSFET transistors in MEMS resonators for improved output detection. In: Solid-state sensors, actuators and microsystems conference, 2007. TRANSDUCERS 2007. International; 2007. p. 1709-12.
  • 7
    • 50349083133 scopus 로고    scopus 로고
    • ANSYS Inc. - Multiphysics website. URL .
    • ANSYS Inc. - Multiphysics website. URL .
  • 8
    • 50349100709 scopus 로고    scopus 로고
    • Synopsys Inc. - Website, TCAD tools (former ISE). URL .
    • Synopsys Inc. - Website, TCAD tools (former ISE). URL .
  • 10
    • 0003532560 scopus 로고    scopus 로고
    • Springer, Springer Science, USA. 0-7923-7246-8 [chapter 6.4.2, p. 132]
    • Senturia S.D. Microsystem design. 1st ed. (2000), Springer, Springer Science, USA. 0-7923-7246-8 [chapter 6.4.2, p. 132]
    • (2000) Microsystem design. 1st ed.
    • Senturia, S.D.1
  • 11
    • 0030655635 scopus 로고    scopus 로고
    • Seeger J, Crary S. Stabilization of electrostatically actuated mechanical devices. In: TRANSDUCERS'97, International conference on solid state sensors and actuators, vol. 2; 1997. p. 1133-6.
    • Seeger J, Crary S. Stabilization of electrostatically actuated mechanical devices. In: TRANSDUCERS'97, International conference on solid state sensors and actuators, vol. 2; 1997. p. 1133-6.
  • 12
    • 2142648903 scopus 로고    scopus 로고
    • De Wolf I. The reliability of RF-MEMS: failure modes, test procedures and instrumentation. In: Proceedings of SPIE, reliability, testing and characterisation of MEMS/MOEMS III 5343; 2004. p. 1-8.
    • De Wolf I. The reliability of RF-MEMS: failure modes, test procedures and instrumentation. In: Proceedings of SPIE, reliability, testing and characterisation of MEMS/MOEMS III 5343; 2004. p. 1-8.
  • 13
    • 2342642163 scopus 로고    scopus 로고
    • WM van Spengen, Puers R, Mertens, R, De Wolf, I. A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches. J Micromech Microeng 2004;4(4):514-21.
    • WM van Spengen, Puers R, Mertens, R, De Wolf, I. A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches. J Micromech Microeng 2004;4(4):514-21.
  • 14
    • 0036544253 scopus 로고    scopus 로고
    • On the effect of residual charges on the pull-in parameters of electrostatic actuators
    • Bochobza-Degani O., Socher E., and Nemirovsky Y. On the effect of residual charges on the pull-in parameters of electrostatic actuators. Sens Actuator A: Phys 97-98 (2002) 563-568
    • (2002) Sens Actuator A: Phys , vol.97-98 , pp. 563-568
    • Bochobza-Degani, O.1    Socher, E.2    Nemirovsky, Y.3
  • 15
    • 47649132953 scopus 로고    scopus 로고
    • Chauhan YS, Tsamados D, Abelé N, Eggimann C, Declercq M, Ionescu AM. Compact modeling of suspended gate FET. In: IEEE international conference on VLSI design; 2008. p. 119-24.
    • Chauhan YS, Tsamados D, Abelé N, Eggimann C, Declercq M, Ionescu AM. Compact modeling of suspended gate FET. In: IEEE international conference on VLSI design; 2008. p. 119-24.
  • 16
    • 0029342165 scopus 로고
    • An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications
    • Enz C.C., Krummenacher F., and Vittoz E.A. An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications. Analog Integr Circuit Signal Process 8 1 (1995) 83-114
    • (1995) Analog Integr Circuit Signal Process , vol.8 , Issue.1 , pp. 83-114
    • Enz, C.C.1    Krummenacher, F.2    Vittoz, E.A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.