-
1
-
-
33847733083
-
Suspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor
-
IEEE International
-
Abele N., Fritschi R., Boucart K., Casset F., Ancey P., and Ionescu A.M. Suspended-gate MOSFET: bringing new MEMS functionality into solid-state MOS transistor. Electron Devices Meeting, 2005. IEDM Technical Digest (2005), IEEE International 479-481
-
(2005)
Electron Devices Meeting, 2005. IEDM Technical Digest
, pp. 479-481
-
-
Abele, N.1
Fritschi, R.2
Boucart, K.3
Casset, F.4
Ancey, P.5
Ionescu, A.M.6
-
2
-
-
33947248679
-
3D design and analysis of functional NEMS-gate MOSFETs and SETs
-
Pruvost B., Mizuta H., and Oda S. 3D design and analysis of functional NEMS-gate MOSFETs and SETs. IEEE Trans Nanotechnol 6 2 (2007) 218-224
-
(2007)
IEEE Trans Nanotechnol
, vol.6
, Issue.2
, pp. 218-224
-
-
Pruvost, B.1
Mizuta, H.2
Oda, S.3
-
3
-
-
33847746657
-
A new nano-electro-mechanical field effect transistor (NEMFET) design for low-power electronics
-
IEEE International
-
Kam H., Lee D., Howe R., and King T.-J. A new nano-electro-mechanical field effect transistor (NEMFET) design for low-power electronics. Electron Devices Meeting, 2005. IEDM Technical Digest (2005), IEEE International 463-466
-
(2005)
Electron Devices Meeting, 2005. IEDM Technical Digest
, pp. 463-466
-
-
Kam, H.1
Lee, D.2
Howe, R.3
King, T.-J.4
-
4
-
-
49549122930
-
-
Colinet E, Durand C, Audebert P, Renaux P, Mercier D, Duraffourg L, et al. Measurement of nano displacement based on in-plane suspended gate MOSFET detection compatible with front-end CMOS process. In: IEEE international conference on solid-state circuits (ISSCC); 2008. p. 332-3.
-
Colinet E, Durand C, Audebert P, Renaux P, Mercier D, Duraffourg L, et al. Measurement of nano displacement based on in-plane suspended gate MOSFET detection compatible with front-end CMOS process. In: IEEE international conference on solid-state circuits (ISSCC); 2008. p. 332-3.
-
-
-
-
5
-
-
33845576089
-
Principles of space-charge based bi-stable MEMS: the junction-MEMS
-
Sallese J.-M., and Bouvet D. Principles of space-charge based bi-stable MEMS: the junction-MEMS. Sens Actuator A: Phys 133 1 (2007) 173-179
-
(2007)
Sens Actuator A: Phys
, vol.133
, Issue.1
, pp. 173-179
-
-
Sallese, J.-M.1
Bouvet, D.2
-
6
-
-
50049111826
-
-
Grogg D, Tsamados D, Badila N-D, Ionescu AM. Integration of MOSFET transistors in MEMS resonators for improved output detection. In: Solid-state sensors, actuators and microsystems conference, 2007. TRANSDUCERS 2007. International; 2007. p. 1709-12.
-
Grogg D, Tsamados D, Badila N-D, Ionescu AM. Integration of MOSFET transistors in MEMS resonators for improved output detection. In: Solid-state sensors, actuators and microsystems conference, 2007. TRANSDUCERS 2007. International; 2007. p. 1709-12.
-
-
-
-
7
-
-
50349083133
-
-
ANSYS Inc. - Multiphysics website. URL .
-
ANSYS Inc. - Multiphysics website. URL .
-
-
-
-
8
-
-
50349100709
-
-
Synopsys Inc. - Website, TCAD tools (former ISE). URL .
-
Synopsys Inc. - Website, TCAD tools (former ISE). URL .
-
-
-
-
10
-
-
0003532560
-
-
Springer, Springer Science, USA. 0-7923-7246-8 [chapter 6.4.2, p. 132]
-
Senturia S.D. Microsystem design. 1st ed. (2000), Springer, Springer Science, USA. 0-7923-7246-8 [chapter 6.4.2, p. 132]
-
(2000)
Microsystem design. 1st ed.
-
-
Senturia, S.D.1
-
11
-
-
0030655635
-
-
Seeger J, Crary S. Stabilization of electrostatically actuated mechanical devices. In: TRANSDUCERS'97, International conference on solid state sensors and actuators, vol. 2; 1997. p. 1133-6.
-
Seeger J, Crary S. Stabilization of electrostatically actuated mechanical devices. In: TRANSDUCERS'97, International conference on solid state sensors and actuators, vol. 2; 1997. p. 1133-6.
-
-
-
-
12
-
-
2142648903
-
-
De Wolf I. The reliability of RF-MEMS: failure modes, test procedures and instrumentation. In: Proceedings of SPIE, reliability, testing and characterisation of MEMS/MOEMS III 5343; 2004. p. 1-8.
-
De Wolf I. The reliability of RF-MEMS: failure modes, test procedures and instrumentation. In: Proceedings of SPIE, reliability, testing and characterisation of MEMS/MOEMS III 5343; 2004. p. 1-8.
-
-
-
-
13
-
-
2342642163
-
-
WM van Spengen, Puers R, Mertens, R, De Wolf, I. A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches. J Micromech Microeng 2004;4(4):514-21.
-
WM van Spengen, Puers R, Mertens, R, De Wolf, I. A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches. J Micromech Microeng 2004;4(4):514-21.
-
-
-
-
14
-
-
0036544253
-
On the effect of residual charges on the pull-in parameters of electrostatic actuators
-
Bochobza-Degani O., Socher E., and Nemirovsky Y. On the effect of residual charges on the pull-in parameters of electrostatic actuators. Sens Actuator A: Phys 97-98 (2002) 563-568
-
(2002)
Sens Actuator A: Phys
, vol.97-98
, pp. 563-568
-
-
Bochobza-Degani, O.1
Socher, E.2
Nemirovsky, Y.3
-
15
-
-
47649132953
-
-
Chauhan YS, Tsamados D, Abelé N, Eggimann C, Declercq M, Ionescu AM. Compact modeling of suspended gate FET. In: IEEE international conference on VLSI design; 2008. p. 119-24.
-
Chauhan YS, Tsamados D, Abelé N, Eggimann C, Declercq M, Ionescu AM. Compact modeling of suspended gate FET. In: IEEE international conference on VLSI design; 2008. p. 119-24.
-
-
-
-
16
-
-
0029342165
-
An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications
-
Enz C.C., Krummenacher F., and Vittoz E.A. An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications. Analog Integr Circuit Signal Process 8 1 (1995) 83-114
-
(1995)
Analog Integr Circuit Signal Process
, vol.8
, Issue.1
, pp. 83-114
-
-
Enz, C.C.1
Krummenacher, F.2
Vittoz, E.A.3
|