Suspended-gate MOSFET; bringing new MEMS functionality into solid-state MOS transistor

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 479-481

  Abele N ^a,b   Fritschi, R ^a   Boucart, K ^a   Casset, F ^c   Ancey, P ^b   Ionescu, A M ^a  

^a EPFL   (Switzerland)

^b STMICROELECTRONICS   (France)

^c CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33847733083     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. W. Newell, Digest of IEEE Solid-State Circuits Conference, Vol. IX, 1966, pp. 62-63.
2. C. T.-C. Nguyen, Digest of Papers, Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Sept. 12-14, 2001, pp. 23-32.
3. A.M. Ionescu et all, Proc. of International Symp. Quality Electronic Design, March 2002, pp. 496 - 501.
4. N. Abelé et al., IEE Electronics Letters, Vol. 41, 2005, pp. 242-244.
5. N. Abelé et al., accepted to the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), January 2006.