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Volumn 92, Issue 11, 2008, Pages 1421-1424
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Two-dimensional LBIC and internal quantum efficiency investigations of porous silicon-based gettering procedure in multicrystalline silicon
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Author keywords
Gettering; IQE mapping; LBIC mapping; Multicrystalline silicon; Passivation
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Indexed keywords
GETTERS;
NONMETALS;
PAINTING;
POLYSILICON;
POROUS SILICON;
SILICON;
TWO DIMENSIONAL;
ETCHING TECHNIQUES;
EXTERNAL-;
GETTERING;
HEAT-TREATMENT;
INTERNAL QUANTUM EFFICIENCY;
IQE MAPPING;
LBIC MAPPING;
MULTICRYSTALLINE SILICON;
PASSIVATION;
POROUS SILICON (PS);
SACRIFICIAL LAYERS;
SILICON-BASED;
SILICON WAFERS;
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EID: 50249177004
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.solmat.2008.06.003 Document Type: Article |
Times cited : (16)
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References (21)
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