Porous silicon and aluminum co-gettering experiment in p-type multicrystalline silicon substrate

Science and Technology of Advanced Materials

Volumn 8, Issue 4, 2007, Pages 231-236

  Vinod, P N ^a  

^a NAVAL PHYSICAL AND OCEANOGRAPHIC LABORATORY   (India)

Author keywords

Gettering process; Lifetime; Multicrystalline silicon; Porous silicon

Indexed keywords

ALUMINUM ALLOYS; DIFFUSION; ELECTROCHEMICAL ETCHING; MICROCAVITIES; PHOTOCONDUCTIVITY; PHOTOCURRENTS;

ELECTRONIC QUALITY; GETTERING PROCESS; LIFETIME; MULTICRYSTALLINE SILICON;

POROUS SILICON;

EID: 34250305144     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.stam.2007.02.002     Document Type: Article

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