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Volumn 194, Issue 2, 2006, Pages 395-408

A homogenization model for laser beam-induced current imaging and detection of non-uniformities in semiconductor arrays

Author keywords

Homogenization; Inverse problems; Laser beam induced current; LBIC; Semiconductor arrays

Indexed keywords

COMPUTER SIMULATION; INVERSE PROBLEMS; LASER BEAMS; MATHEMATICAL MODELS; QUALITY CONTROL; SEMICONDUCTOR COUNTERS; SEMICONDUCTOR DIODES;

EID: 33646535337     PISSN: 03770427     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cam.2005.08.007     Document Type: Article
Times cited : (3)

References (18)
  • 1
    • 0001180167 scopus 로고
    • Spatial mapping of electrically active defects in HgCdTe using laser beam induced current by scanning laser microscopy
    • Bajaj J., Bubulac L.O., Newman P.R., Tennant W.E., and Raccah P.M. Spatial mapping of electrically active defects in HgCdTe using laser beam induced current by scanning laser microscopy. J. Vac. Sci. Technol. A 5 5 (1987) 3186-3189
    • (1987) J. Vac. Sci. Technol. A , vol.5 , Issue.5 , pp. 3186-3189
    • Bajaj, J.1    Bubulac, L.O.2    Newman, P.R.3    Tennant, W.E.4    Raccah, P.M.5
  • 2
    • 0025440738 scopus 로고
    • Remote contact LBIC imaging of defects in semiconductors
    • Bajaj J., and Tennant W.E. Remote contact LBIC imaging of defects in semiconductors. J. Crystal Growth 103 (1990) 170-178
    • (1990) J. Crystal Growth , vol.103 , pp. 170-178
    • Bajaj, J.1    Tennant, W.E.2
  • 3
    • 0027609744 scopus 로고
    • Spatially resolved characterisation of HgCdTe materials and devices by scanning laser microscopy
    • Bajaj J., Tennant W.E., Zucca R., and Irvine S.J.C. Spatially resolved characterisation of HgCdTe materials and devices by scanning laser microscopy. Semicond. Sci. Technol. 8 (1993) 872-887
    • (1993) Semicond. Sci. Technol. , vol.8 , pp. 872-887
    • Bajaj, J.1    Tennant, W.E.2    Zucca, R.3    Irvine, S.J.C.4
  • 4
    • 0036906174 scopus 로고    scopus 로고
    • H.T. Banks, F. Kojima, Identification of material damage in two-dimensional domains using the SQUID-based nondestructive evaluation system, Inverse Problems (2002) 1831-1855.
  • 6
    • 0027544131 scopus 로고
    • Modeling and analysis for laser beam induced current images in semiconductors
    • Busenberg S., Fang W., and Ito K. Modeling and analysis for laser beam induced current images in semiconductors. SIAM J. Appl. Math. 53 (1993) 187-204
    • (1993) SIAM J. Appl. Math. , vol.53 , pp. 187-204
    • Busenberg, S.1    Fang, W.2    Ito, K.3
  • 8
    • 0027079795 scopus 로고
    • Identifiability of semiconductor defects from LBIC images
    • Fang W., and Ito K. Identifiability of semiconductor defects from LBIC images. SIAM J. Appl. Math. 52 (1992) 1611-1626
    • (1992) SIAM J. Appl. Math. , vol.52 , pp. 1611-1626
    • Fang, W.1    Ito, K.2
  • 9
    • 0028484827 scopus 로고
    • Reconstruction of semiconductor doping profile from laser-beam-induced current image
    • Fang W., and Ito K. Reconstruction of semiconductor doping profile from laser-beam-induced current image. SIAM J. Appl. Math. 54 (1994) 1067-1082
    • (1994) SIAM J. Appl. Math. , vol.54 , pp. 1067-1082
    • Fang, W.1    Ito, K.2
  • 10
    • 0036665087 scopus 로고    scopus 로고
    • Parameter identification of semiconductor diodes by LBIC imaging
    • Fang W., Ito K., and Redfern D.A. Parameter identification of semiconductor diodes by LBIC imaging. SIAM J. Appl. Math. 62 (2002) 2149-2174
    • (2002) SIAM J. Appl. Math. , vol.62 , pp. 2149-2174
    • Fang, W.1    Ito, K.2    Redfern, D.A.3
  • 11
    • 9944230603 scopus 로고    scopus 로고
    • LBIC imaging of semiconductor arrays: the cross sectional model
    • Fang W., Ito K., and Redfern D.A. LBIC imaging of semiconductor arrays: the cross sectional model. Math. Comput. Modelling 40 (2004) 127-136
    • (2004) Math. Comput. Modelling , vol.40 , pp. 127-136
    • Fang, W.1    Ito, K.2    Redfern, D.A.3
  • 13
    • 0000603653 scopus 로고    scopus 로고
    • Laser beam induced current as a tool for HgCdTe photodiode characterisation
    • Musca C.A., Redfern D.A., Dell J.M., and Faraone L. Laser beam induced current as a tool for HgCdTe photodiode characterisation. Microelectron. J. 31 (2000) 537-544
    • (2000) Microelectron. J. , vol.31 , pp. 537-544
    • Musca, C.A.1    Redfern, D.A.2    Dell, J.M.3    Faraone, L.4
  • 16
    • 3042790440 scopus 로고    scopus 로고
    • Correlation of laser beam induced current with current-voltage measurements in HgCdTe photodiodes
    • Redfern D.A., Musca C.A., Dell J.M., and Faraone L. Correlation of laser beam induced current with current-voltage measurements in HgCdTe photodiodes. J. Electron. Mater. 33 (2004) 560-571
    • (2004) J. Electron. Mater. , vol.33 , pp. 560-571
    • Redfern, D.A.1    Musca, C.A.2    Dell, J.M.3    Faraone, L.4
  • 17
    • 33646508925 scopus 로고    scopus 로고
    • D.A. Redfern, E.P.G. Smith, C.A. Musca, J.M. Dell, L. Faraone, Interpretation of current flow in photodiode structures using laser beam induced current for characterisation and diagnostics, IEEE Trans. Electron. Dev., accepted for publication.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.