Modeling and simulation of a surface micromachined knudsen pump

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2006, Pages

  Gupta, Naveen K ^a   Gianchandani, Yogesh B ^a  

^a The Department of Civil and Environmental Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; MICROMACHINING; NUMERICAL ANALYSIS;

KENNARD'S MODEL; KNUDSEN PUMP; NARROW CHANNELS;

PUMPS;

EID: 85196543744     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2006-14940     Document Type: Conference Paper

References (27)

1. Reynolds, O., 1878, "On Certain Dimensional Properties of Matter in the Gaseous State," Philos. Tran. Royal Society London, 170, pp. 727-845.
2. Maxwell, J. C., 1879, "On Stresses in Rarefied Gases Arising from Inequalities of Temperature," Philos. Tran. Royal Society London, 170, pp. 231-256.
3. Karniadakis, G. E., Beskok, A., and Aluru, N., 2005, Microflows and Nanoflows: Fundamentals and Simulation, Springer, New York, Chap. 1.
4. Knudsen, M., 1910, "Eine Revision der Gleichgewichtsbedingung der Gase. Thermische Molecularstr'omung," Ann. Phys., Leipzig, 31, pp. 205-229.
5. Kolesar, E. S., Jr., Spangler, G. E., 1998, "Review and Summary of a Silicon Micromachined Gas Chromatography System," IEEE Transactions on Components Packaging and Manufacturing Technology, Part B: Advanced Packaging, 21(4), pp. 324-328.
6. th Intl. Conference of Miniaturized Chemical and Biochemical Analysis Systems, pp. 411-415.
7. Agah, M., Potkay, J. A., Lambertus, G., Sacks, R., and Wise, K. D., 2005, "High-Performance Temperature Programmed Microfabricated Gas Chromatography Columns," Journal of Microelectromechanical Systems, 14(5), pp. 1039-1050.
8. Kolesar, E. S., Jr., and Spangler, G. E., 2001, "Advances in Fabricating Silicon Micromachined Gas Chromatographic Columns," Twenty-Fourth International Symposium of the American Chemical Society (ACS) on Capillary Chromatography and Electrophoresis, Las Vegas, NV.
9. Tian, W. C., Pang, S. W., Lu, C.-J., and Zellers, E. T., 2003, "Microfabricated Preconcentrator-Focuser for a Microscale Gas Chromatograph," Journal of Microelectromechanical Systems, 12(3), pp. 264-272.
10. Nguyen, N. T., Huang, X., Chuan, T. K., 2002, "MEMS-Micropumps: A Review," ASME J. Fluid Eng. 124(22), pp. 384-392.
11. Vargo, S. E., Muntz, E. P., Shifflett, G. R., 1999, "Knudsen Compressor as a micro- and macroscale vacuum pump without moving parts or fluids," J. Vac. Sci. Technol., A17(4), pp. 2308-2313.
12. Vargo, S. E., Muntz, E. P., 2001, "Initial results from the first MEMS fabricated thermal transpiration-driven vacuum pump," Rarefied Gas Dynamics, AIP Conference Proceedings, 585, pp. 502-509.
13. McNamara, S., and Gianchandani, Y. B., 2005, "On-Chip Vacuum Generated by a Micromachined Knudsen Pump," J. Microelectromechanical Systems, 14(4), pp. 741-746.
14. Kennard, E. H., 1938, Kinetic Theory of Gases, McGraw Hill, pp. 327-332.
15. Loeb, L. B., 1934, The Kinetic Theory of Gases, McGraw Hill, pp. 355-359.
16. Hwang, S.-T., Kammermeyer, K., 1974, "Membranes in Separation," Techniques of Chemistry, Vol. VII, John Wiley Sons, Chap. VI.
17. Williams III, J. C., 1970, "Thermal Transpiration - A Continuum Gasdynamics View," J. Vac. Sci. Technol., 8, pp. 446-450.
18. Ebert, W. A., and Sparrow, E. M., 1965, "Slip flow in rectangular and annular ducts," J. Basic Eng, 87, p. 1018-1024.
19. Morini, G. L., and Spiga, M., 1998, "Slip flow in rectangular microtubes," Microscale Therm. Eng., 2(4), pp. 273-282.
20. Aubert, C., and Colin, S., 2001, "Higher order boundary conditions for gaseous flows in rectangular microchannels," Microscale Therm. Eng., 5(1), pp. 41-54.
21. Colin, S., Lalonde, P., and Caen, R., 2004, "Validation of a second order slip flow model in rectangular microchannels," Heat Transfer Eng. 25(3), pp. 23-30.
22. Maurer, J., Tabling, P., Joseph, P., and Willaime, H., 2003, "Second order slip laws in microchannels for helium and nitrogen," Phys. Fluids, 15(9), pp. 2613-2621.
23. Arkilic, E. B., Breuer, K. S., and Schmidt, M. A., 2001, "Mass flow and tangential momentum accommodation in silicon micromachined channels," J. Fluid Mech., 437, pp. 29-43.
24. Bhatnagar, P., Gross, E., and Krook, K., 1954, "A model for collision processes in gases," Phys. Review, 94, pp. 511-524.
25. Sharipov, F., 1999, "Non-isothermal gas flow through rectangular microchannels," J. Micromechanics and Microengineering, 9, pp 394-401.
26. Bird, G. A., 1994, Molecular Gas Dynamics and the Direct Simulation of Gas Flows. Oxford, UK.
27. Oran, E. S., Oh, C. K., Cybyk, B. Z., 1998, "Direct Simulation Monte Carlo: Recent Advances and Applications," Annu. Rev. Fluid Mech., 30, pp. 403-441.0