An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 520-528

  Acar, Cenk ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

Inertial sensors; MEMS; Micromachined gyroscopes; Rate sensors

Indexed keywords

FINITE ELEMENT METHOD; GYROSCOPES; MICROMACHINING; MICROSENSORS; NATURAL FREQUENCIES; OPTIMIZATION; OSCILLATORS (ELECTRONIC); PHOTOLITHOGRAPHY; SILICON ON INSULATOR TECHNOLOGY;

INERTIAL SENSORS; MICROMACHINED GYROSCOPES; RATE SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 22444447022     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844801     Document Type: Article

References (18)

1. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE, vol. 86, no. 8, pp. 1640-1658, Aug. 1998.
2. W. A. Clark, R. T. Howe, and R. Horowitz, "Surface micromachined Z-axis vibratory rate gyroscope," in Proc. Solid-State Sensors and Actuators, Hilton Head, SC, Jun. 1996.
3. A. Shkel, R. Horowitz, A. Seshia, S. Park, and R. T. Howe, "Dynamics and control of micromachined gyroscopes," in Proc. American Control Conf., CA, 1999.
4. S. Park and R. Horowitz, "Adaptive control for Z-axis MEMS gyroscopes," in Proc. American Control Conference, Arlington, VA, Jun. 2001.
5. R. P. Leland, "Adaptive tuning for vibrational gyroscopes," in Proc. IEEE Conference on Decision and Control, Orlando, FL, Dec. 2001.
6. A. Shkel, R. T. Howe, and R. Horowitz, "Modeling and simulation of micromachined gyroscopes in the presence of imperfections," in Proc. Int. Conf. on Modeling and Simulation of Microsystems, 1999.
7. H. Xie and G. K. Fedder, "A DRIE CMOS-MEMS gyroscope," in IEEE Sensors 2002 Conference, Orlando, FL, Jun. 2002.
8. C. Acar and A. Shkel, "Four degrees-of-freedom micromachined gyroscopes," J. Modeling Sim. Microsyst., vol. 2, pp. 71-82, 2001.
9. C. Acar and A. Shkel, "Non-resonant micromachined gyroscopes with structural mode-decoupling," IEEE Sensors J., vol. 3, no. 4, pp. 497-506, 2003.
10. C. Acar and A. Shkel, "Distributed-mass micromachined gyroscopes for enhanced mode-decoupling," in Proc: IEEE Sensors Conference, Toronto, Canada, Sep. 2003.
11. C. Acar and A. Shkel, "Enhancement of drive-mode bandwidth in MEMS vibratory gyroscopes utilizing multiple oscillators," in Proc. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 2004.
12. J. A. Geen, "A path to low cost gyroscopy," in Solid-State Sensor and Actuator Workshop, Hilton-Head, 1998, pp. 51-54.
13. W. Geiger et al., "Decoupled microgyros and the design principle DAVED," IEEE Sensors J., pp. 170-173, 2001.
14. Y. Mochida et al., "A micromachined vibrating rate gyroscope with independent beams for drive and detection modes," Sens. Actuators A, Phys., vol. 80, pp. 170-178, 2000.
15. M. Niu et al., "Design and characteristics of two-gimbals micro-gyroscopes fabricated with quasi-LIGA process" in Proc. Int. Conf. on Solid-State Sensor and Actuators, 1997, pp. 891-894.
16. H. T. Lira, J. W. Song, J. G. Lee, and Y. K. Kim, "A few deg/hr resolvable low noise lateral microgyroscope," in Proc. IEEE MEMS Conference, NV, 2002, pp. 627-630.
17. [Online]. Available: http://www.analogdevices.com
18. Y. S. Hong, J. H. Lee, and S. H. Kim, "A laterally driven symmetric micro-resonator for gyroscopic applications," J. Micromech. Microeng., vol. 10, pp. 452-458, 2000.