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Volumn 93, Issue 6, 2008, Pages

Spontaneous nanoclustering of ZrO2 in atomic layer deposited LayZr1-yOx thin films

Author keywords

[No Author keywords available]

Indexed keywords

LANTHANUM; PULSED LASER DEPOSITION;

ATOMIC LAYER DEPOSITIONS;

ATOMIC LAYER DEPOSITION;

EID: 49749128846 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2971032 Document Type: Article

Times cited : (11)

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