Moisture-absorption-induced permittivity deterioration and surface roughness enhancement of lanthanum oxide films on silicon

Applied Physics Letters

Volumn 88, Issue 7, 2006, Pages

  Zhao, Yi ^a   Toyama, Masahiro ^a   Kita, Koji ^a   Kyuno, Kentaro ^a   Toriumi, Akira ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HYGROSCOPIC FILMS; LANTHANUM OXIDE FILMS; MOISTURE-ABSORPTION;

LANTHANUM COMPOUNDS; MOISTURE; PERMITTIVITY; SILICON; SURFACE ROUGHNESS; WATER ABSORPTION;

THIN FILMS;

EID: 32944454322     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2174840     Document Type: Article

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