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Volumn 46, Issue 7 A, 2007, Pages 4189-4192

Suppression of leakage current and moisture absorption of la 2O3 films with ultraviolet ozone post treatment

Author keywords

Gate dielectric; Lanthanum oxide; Leakage current; Moisture absorption; Ultraviolet ozone treatment

Indexed keywords

ABSORPTION; LANTHANUM COMPOUNDS; LEAKAGE CURRENTS; MOISTURE;

LANTHANUM OXIDE; MOISTURE ABSORPTION; ULTRAVIOLET OZONE TREATMENT;

GATE DIELECTRICS;

EID: 34547850332 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.4189 Document Type: Article

Times cited : (37)

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