Synthesis of nitrogen passivated rare-earth doped hafnia thin films and high temperature electrochemical conduction studies

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 4, 2008, Pages

  Ramanathan, S ^a   Karthikeyan, A ^a   Govindarajan, S A ^b   Kirsch, P D ^b  

^a HARVARD UNIVERSITY   (United States)

^b SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTION STUDIES; CRYSTALLINE OXIDES; DIELECTRIC CONSTANTS; ELECTRICAL CHARACTERIZATIONS; HIGH TEMPERATURE; LOW LEAKAGE; RARE-EARTH DOPED; SEMI-CONDUCTOR SURFACES;

CRYSTALLINE MATERIALS; LEAKAGE CURRENTS; NITROGEN; NONMETALS; PASSIVATION; RARE EARTH ELEMENTS; RHENIUM; THIN FILMS;

THICK FILMS;

EID: 49749125629     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2957622     Document Type: Article

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