Micromachined in-plane vibrating diffraction grating laser scanner

IEEE Photonics Technology Letters

Volumn 16, Issue 10, 2004, Pages 2293-2295

  Zhou, Guangya ^a   Logeeswaran, V J ^a   Chau, Fook Siong ^a   Tay, Francis E H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELECTRIC POTENTIAL; ELECTROSTATICS; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; SCANNING; VIBRATIONS (MECHANICAL);

LASER SCANNER; MICROMIRROR SCANNERS; MICROSCANNERS; OPTICAL ANGLE; OPTICAL MEMS; OPTICAL PERFORMANCE;

DIFFRACTION GRATINGS;

EID: 5444270631     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.834847     Document Type: Article

References (6)

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