Spatially and temporally resolved thermal imaging of cyclically heated interconnects by use of scanning thermal microscopy

Microscopy Research and Technique

Volumn 71, Issue 8, 2008, Pages 579-584

  Barbosa III, Nicholas ^a   Slifka, Andrew J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Calibration; Cyclic joule heating; Interconnect; Scanning thermal microscope; SThM; Temperature distribution; Temporal; Thermal cycling; Wollaston probe

Indexed keywords

ALUMINUM; INFRARED IMAGING; TEMPERATURE MEASUREMENT; THERMAL CYCLING;

'CURRENT; CYCLIC JOULE HEATING; INTERCONNECT; JOULES HEATING; SCANNING THERMAL MICROSCOPE; SPATIALLY RESOLVED; STHM; TEMPORAL; THERMAL-CYCLING; WOLLASTA PROBE;

PROBES;

ALUMINUM;

ANALYTICAL EQUIPMENT; ARTICLE; CALIBRATION; HEATING; MECHANICAL PROBE; PERCEPTRON; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPY; SCANNING THERMAL MICROSCOPY; TEMPERATURE MEASUREMENT; THERMOGRAPHY;

EID: 49749088403     PISSN: 1059910X     EISSN: 10970029     Source Type: Journal    
DOI: 10.1002/jemt.20589     Document Type: Article

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