Microdevice for measuring friction and adhesion properties of sidewall contact interfaces of microelectromechanical systems

Review of Scientific Instruments

Volumn 78, Issue 6, 2007, Pages

  Timpe, S J ^a   Komvopoulos, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ELECTRIC CONTACTS; FRICTION; SURFACE MICROMACHINING; SURFACE TREATMENT; TESTING; TRIBOLOGY;

DYNAMIC FRICTION; MICRODEVICE; NORMAL FORCE; SIDEWALL CONTACT;

MEMS;

ADHESION; ARTICLE; ELECTROCHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; FRICTION; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

ADHESIVENESS; ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FRICTION; MATERIALS TESTING; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS;

EID: 34547274267     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2742648     Document Type: Article

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