Electron-beam deposited boron coatings for the extreme ultraviolet

Applied Optics

Volumn 47, Issue 16, 2008, Pages 2926-2930

  Vidal Dasilva, Manuela ^a   Fernández Perea, Mónica ^a   Méndez, José A ^a   Aznárez, José A ^a   Larruquert, Juan I ^a  

^a Consejo Superior de Investigaciones Científicas   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ION BEAMS; METALLIC FILMS; REFLECTION; SILICON CARBIDE;

BORON COATINGS; BORON FILMS; EXTREME ULTRAVIOLET;

BORON;

EID: 49649128399     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.002926     Document Type: Conference Paper

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