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Volumn 41, Issue 25, 2002, Pages 5398-5404

Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet

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EID: 0036711907     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.005398     Document Type: Article
Times cited : (33)

References (23)
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