Far-ultraviolet absolute reflectometer for optical constant determination of ultrahigh vacuum prepared thin films

Review of Scientific Instruments

Volumn 67, Issue 2, 1996, Pages 497-502

  Aznarez J A ^a   Larruquert, J I ^a   Mendez J A ^a  

^a Consejo Superior de Investigaciones Científicas   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ALUMINUM; ANGLE MEASUREMENT; ATOMIC FORCE MICROSCOPY; CALCULATIONS; LIGHT MODULATION; LIGHT POLARIZATION; MONOCHROMATORS; SURFACE ROUGHNESS; THIN FILMS; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

DIFFERENTIAL PRESSURE SYSTEM; FAR ULTRAVIOLET ABSOLUTE REFLECTOMETERS; FRESNEL EQUATIONS; INCIDENCE ANGLE; OPTICAL CONSTANTS; ULTRAHIGH VACUUM;

REFLECTOMETERS;

EID: 0030082199     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146628     Document Type: Article

References (44)

1. R. Tousey, Appl. Opt. 1, 679 (1962).
2. R. P. Madden, in Physics of Thin Films, edited by G. Hass (Academic, New York, 1963), Vol. 1, pp. 123-126.
3. U. Feldman, G. A. Doschek, and J. F. Seely, J. Opt. Soc. Am. 5, 2237 (1988).
4. Lyman Project, Assessment study, Eur. Space Agency SCI(85) 4, 5 (1985).
5. G. Hass and W. R. Hunter, in Ref. 2, Vol. 10, pp. 127-166.
6. V. Rhen and V. O. Jones, Opt. Eng. 17, 504 (1978).
7. B. E. Newnam, Opt. Eng. 30, 1100 (1991).
8. G. Hass and W. R. Hunter, in Ref. 2, Vol. 10, pp. 91-114.
9. R. A. M. Keski-Kuha, J. F. Osantowski, H. Herzig, J. S. Gum, and A. R. Toft, Appl. Opt. 27, 2815 (1988).
10. P. Dhez, Ann. Phys. France 15, 493 (1990).
11. T. W. Barbee, Jr., S. Mrowka, and M. C. Hettrick, Appl. Opt. 24, 883 (1985).
12. P. Madden, L. R. Canfield, and G. Hass, J. Opt. Soc. Am. 53, 620 (1963).
13. G. Hass and W. R. Hunter, Appl. Opt. 6, 2097 (1967).
14. J. F. Osantowski, P. M. Davila, and T. T. Saha, Opt. Eng. 25, 1039 (1986).
15. In Ref. 4, pp. 49-53.
16. J. A. Aznárez, J. A. Méndez, J. L. Sacedón, and M. Sánchez-Avedillo, Space Aluminum Coating Test. Technical Report, European Space Agency, In-Orbit Technology Demonstration Programme, 1988.
17. R. P. Madden, in Ref. 2, pp. 130-135.
18. W. R. Hunter, J. Opt. Soc. Am. 55, 1197 (1965).
19. W. R. Hunter, Appl. Opt. 6, 2140 (1967).
20. R. P. Madden and L. R. Canfield, J. Opt. Soc. Am. 51, 838 (1961).
21. L. Marton and J. Toots, Phys. Rev. 160, 602 (1967).
22. R. C. Vehse and E. T. Arakawa, Phys. Rev. 180, 695 (1969).
23. M. L. Scott, P. N. Arendt, B. J. Cameron, J. M. Saber, and B. E. Newnam, Appl. Opt. 27, 1503 (1988).
24. K. T. Chee, F. E. Girouard, and V. V. Truong, Appl. Opt. 18, 1702 (1979).
25. B. P. Feuerbacher and W. Steinmann, Opt. Commun. 1, 81 (1969).
26. A. Daudé and S. Robin, Rev. Phys. Appl. 1, 120 (1966).
27. A. Daudé and S. Robin, Nouv. Rev. d'Opt. Appl. 2, 57 (1971).
28. J. S. Edmends, C. N. Maldé, and S. J. B. Corrigan, Vacuum 40, 471 (1990).
29. M. Skibowski, B. Feuerbacher, W. Steinmann, and R. P. Godwin, Zeit. Phys. 211, 329 (1968).
30. T. J. Moravec, J. C. Rife, and R. N. Dexter, Phys. Rev. B 13, 3297 (1976).
31. W. E. Wall, M. W. Ribarsky, and J. R. Stevenson, J. Appl. Phys. 51, 661 (1980).
32. H.-G. Birken, C. Blessing, C. Kunz, and R. Wolf, Rev. Sci. Instrum. 60, 2223 (1989).
33. P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces (Pergamon/MacMillan, New York, 1963), Chap. V.
34. J. Larruquert, J. A. Méndez, and J. A. Aznárez, Appl. Opt. 33, 3518 (1994).
35. J. Larruquert, J. A. Méndez, and J. A. Aznárez, Appl. Opt. 34, 4892 (1995).
36. J. P. Locquet and E. Mächler, J. Vac. Sci. Technol. A 10, 3100 (1992).
37. A. Roth, Vacuum Technology, 3rd ed. (North-Holland, Amsterdam, 1990), Chap. V.
38. Y. Tanaka, A. S. Jursa, and F. J. LeBlanc, J. Opt. Soc. Am. 48, 304 (1958).
39. D. L. Windt, W. C. Cash, Jr., M. Scott, P. Arendt, B. Newnam, R. F. Fisher, A. B. Swartzlander, P. Z. Takacs, and J. M. Pinneo, Appl. Opt. 27, 279 (1988).
40. R. Wolf, H. G. Birken, and C. Kunz, Appl. Opt. 31, 7313 (1992).
41. P. Croce, J. Opt. 8, 127 (1977).
42. W. R. Hunter and J. C. Rife, Nucl. Instrum. Methods A 246, 465 (1986).
43. K. Rabinovitch, L. R. Canfield, and R. P. Madden, Appl. Opt. 4, 1005 (1965).
44. J. H. Weaver, C. Krafka, D. W. Lynch, and E. E. Koch, Physik Daten Nr. 18-2 (Fachinformationszentrum Energie-Physik-Mathematik GmbH, Karlsruhe, Germany, 1981).