High-pressure phase equilibria for chlorosilane + carbon dioxide mixtures

Fluid Phase Equilibria

Volumn 270, Issue 1-2, 2008, Pages 121-128

  Vyhmeister, Eduardo ^a,b   Muscat, Anthony J ^a   Suleiman, David ^b   Estévez, L Antonio ^b  

^a University of Arizona   (United States)

^b UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

Chlorosilane; Critical locus; Diethyldichlorosilane; Dimethyldichlorosilane; Fluid phase equilibrium; Methyltrichlorosilane; Mixture critical point; Supercritical carbon dioxide; Trimethylchlorosilane

Indexed keywords

ALLOYS; BINARY MIXTURES; CARBON DIOXIDE; CHEMICAL ENGINEERING; CORUNDUM; EQUATIONS OF STATE;

BINARY SYSTEMS; BUBBLE POINTS; CHLOROSILANE; CONSTANT-COMPOSITION; CRITICAL LOCUS; CRITICAL POINTS; DEW POINTS; DIETHYLDICHLOROSILANE; DIMETHYLDICHLOROSILANE; FLUID-PHASE EQUILIBRIA; FLUID-PHASE EQUILIBRIUM; HIGH-PRESSURE PHASE EQUILIBRIUM; METHYLTRICHLOROSILANE; MIXTURE CRITICAL POINT; SUPERCRITICAL CARBON DIOXIDE; TRIMETHYLCHLOROSILANE; VISUAL OBSERVATIONS;

PHASE EQUILIBRIA;

EID: 49549083238     PISSN: 03783812     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.fluid.2008.06.017     Document Type: Article

References (23)

1. Weibel G., and Ober C.K. Microelectron. Eng. 65 (2003) 145-152
2. King J.W., and Williams L.L. Curr. Opin. Solid State Mater. Sci. 7 (2003) 413-424
3. Jones C., Zweber A., DeYoung J., McClain J., Carbonell R., and DeSimone J. Crit. Rev. Solid State Mater. Sci. 29 (2004) 97-109
4. Barua D., Gougousi T., Young E.D., and Parsons G.N. Appl. Phys. Lett. 88 (2006) 092904
5. Rajagopalan T., Sun J., Lahlouh B., Lubguban J.A., Huang D., Biswas N., Simon S.L., Gangopadhyay S., Malikarjun A., Kim H.C., Volksen W., and Miller R.D. Appl. Phys. Lett. 82 (2003) 4328-4330
6. Namatsu H., Yamazaki K., and Kurihara K. Microelectron. Eng. 46 (1999) 129-132
7. Goldfarb D.L., de Pablo J.J., Nealey P.F., Simons J.P., Moreau W.M., and Angelopoulos M. J. Vac. Sci. Technol. B: Microelectron. Nanometer Struct. Process. Meas. Phenom. 18 6 (2000) 3313-3317
8. Cao C., Fadeev A., and McCarthy T. Langmuir 17 (2001) 757-761
9. Xie B., and Muscat A. Microelectron. Eng. 76 (2004) 52-59
10. Xie B., Choate L., and Muscat A. Microelectron. Eng. 80 (2005) 349-352
11. Xie B., and Muscat A. Microelectron. Eng. 82 (2005) 434-440
12. McHugh M., and Krukonis V. Supercritical Fluid Extraction. 2nd ed. (1994), Butterworth-Heinemann, Newton, MA
13. McHugh M., and Paulaitis M.E. J. Chem. Eng. Data 25 (1980) 326-329
14. Morrison G. J. Phys. Chem. 85 (1981) 759-761
15. Angus S., Armstrong B., and de Reuck K.M. International Thermodynamic Tables of the Fluid State-3 Carbon Dioxide (1976), Pergamon, New York
16. NIST Thermophysical Properties of Fluid System. National Institute of Standards and Technology. Available on line: http://webbook.nist.gov/cgi/cbook.cgi?ID=C124389. Accessed: June 2008.
17. Qiu Z.-M., Xie X.-L., Luo M., and Xie F.-X. J. Zhejiang Univ. Sci. B 6 (2005) 559-562
18. Ruginǎ T., and Sǎcǎrescu L. J. Chem. Eng. Data 37 (1992) 143-145
19. Byun H.-S., and Lee H.-Y. J. Chem. Eng. Data 51 (2006) 1436-1440
20. Macdonald J.R., and Kenkel S.W. J. Phys. D: Appl. Phys. 16 (1983) L195-L199
21. Prausnitz J.M., Lichtenthaler R.N., and Gomez de Azevedo E. Molecular Thermodynamics of Fluid Phase Equilibrium. 3rd ed. (1999), Prentice Hall, Upper Saddle River, NJ
22. Peng D.Y., and Robinson D.B. Ind. Eng. Chem. Fundam. 15 (1976) 59-64
23. Tester J.W., and Modell M. Thermodynamics and Its Applications. 3rd ed. (1997), Prentice Hall, Upper Saddle River, NJ