Focused ion beam specimen preparation for off-axis electron holography using Si, Ga, and Au ions

Applied Physics Letters

Volumn 93, Issue 4, 2008, Pages

  Cooper, David ^a   Bertin, Francois ^a   Salles, Phillipe ^b   Benassayag, Gerard ^b  

^a CEA LETI   (France)

^b CEMES CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; DATA RECORDING; ELECTROLYSIS; ELECTRON HOLOGRAPHY; FOCUSED ION BEAMS; GOLD; HOLOGRAPHIC INTERFEROMETRY; HOLOGRAPHY; IMAGING TECHNIQUES; INTERFEROMETRY; ION BEAMS; ION BOMBARDMENT; ION SOURCES; LASER RECORDING; NONMETALS; PHOTONICS; SEMICONDUCTOR JUNCTIONS; SILICON; SPECIMEN PREPARATION;

FOCUSED ION BEAM MILLING; GOLD ION; OFF-AXIS ELECTRON HOLOGRAPHY; P-N JUNCTIONS;

IONS;

EID: 49149108358     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2960351     Document Type: Article

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