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Volumn 93, Issue 4, 2008, Pages

Focused ion beam specimen preparation for off-axis electron holography using Si, Ga, and Au ions

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; DATA RECORDING; ELECTROLYSIS; ELECTRON HOLOGRAPHY; FOCUSED ION BEAMS; GOLD; HOLOGRAPHIC INTERFEROMETRY; HOLOGRAPHY; IMAGING TECHNIQUES; INTERFEROMETRY; ION BEAMS; ION BOMBARDMENT; ION SOURCES; LASER RECORDING; NONMETALS; PHOTONICS; SEMICONDUCTOR JUNCTIONS; SILICON; SPECIMEN PREPARATION;

EID: 49149108358     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2960351     Document Type: Article
Times cited : (15)

References (13)
  • 2
    • 49149118330 scopus 로고    scopus 로고
    • See for International Technology Roadmafor Semiconductors, 2007 edition. (Semiconductor Industry Association, San Jose, CA, 2005).
    • See http://public.itrs.net for International Technology Roadmap for Semiconductors, 2007 edition. (Semiconductor Industry Association, San Jose, CA, 2005).
  • 8
    • 49149095681 scopus 로고
    • MRS Symposia Proceeding No. 199, edited by R. Anderson (Materials Research Society, Pittsburgh)
    • K. H. Park, Workshop on Specimen Preparation for BM of Materials, MRS Symposia Proceeding No. 199, edited by, R. Anderson, (Materials Research Society, Pittsburgh, 1990), pp. 271-274.
    • (1990) Workshop on Specimen Preparation for BM of Materials , pp. 271-274
    • Park, K.H.1
  • 10
    • 49149098844 scopus 로고    scopus 로고
    • see for The Stopping and Range of Ions in Matter.
    • J. F. Zeigler, see www.srim.org for The Stopping and Range of Ions in Matter, 2003.
    • (2003)
    • Zeigler, J.F.1
  • 13
    • 49149095943 scopus 로고    scopus 로고
    • in Proceedings of Sixteenth International Microscopy Congress, Sapporo, Japan, 3-8 September.
    • P. Formanek, in Proceedings of Sixteenth International Microscopy Congress, Sapporo, Japan, 3-8 September 2006.
    • (2006)
    • Formanek, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.