A new self-aligned nitride MTP cell with 45nm CMOS fully compatible process

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 91-94

  Huang, Chia En ^a   Chen, Hsin Ming ^b   Lai, Han Chao ^a   Chen, Ying Je ^a   King, Ya Chin ^a   Chrong, Jung Lin ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b EMEMORY TECHNOLOGY INC   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CELLS; ELECTRON DEVICES; NITRIDES;

CELL SIZES; CMOS TECHNOLOGIES; MULTIPLE-TIME PROGRAMMING; NITRIDE STORAGE; NVM APPLICATIONS; SELF-ALIGNED; ULTRA-SMALL;

CYTOLOGY;

EID: 48649106381     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418871     Document Type: Conference Paper

References (6)

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