Gas pressure sensing based on MEMS resonators

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 1251-1254

  Bruckner K ^a   Cimalla, V ^a   Niebelschutz F ^a   Stephan, R ^a   Tonisch, K ^a   Ambacher, O ^a   Hein, M A ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROMAGNETIC FIELD EFFECTS; ELECTROMAGNETISM; FREQUENCY RESPONSE; LORENTZ FORCE; MAGNETIC FIELD EFFECTS; MAGNETIC FIELDS; MAGNETISM; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PHOTORESISTS; PRESSURE SENSORS; RESONATORS; SILICON CARBIDE; TECHNOLOGY;

ABSOLUTE PRESSURES; AMBIENT PRESSURE; FREQUENCY DOMAINS; GAS PRESSURES; HIGH SENSITIVITIES; IN DEPENDENCE; LIFE SCIENCES; MEMS RESONATORS; OPERATION FREQUENCIES; PERMANENT MAGNETIC; POTENTIAL APPLICATIONS; QUALITY FACTOR; RESONANT RESPONSE; RESONATOR GEOMETRIES; RF PERFORMANCE; RF SENSORS; SEMICONDUCTOR FABRICATION PROCESSES;

SENSORS;

EID: 48349137073     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388636     Document Type: Conference Paper

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