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Volumn 76, Issue 5, 2005, Pages
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Microfabricated temperature standard based on Johnson noise measurement for the calibration of micro- and nano-thermometers
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Author keywords
[No Author keywords available]
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Indexed keywords
JOHNSON NOISE;
MONOLITHIC AMPLIFIERS;
SENSOR DEVICES;
THERMAL RESISTOR NOISE;
ATOMIC FORCE MICROSCOPY;
CALIBRATION;
ELECTRON BEAM LITHOGRAPHY;
MICROMACHINING;
RESISTORS;
SEMICONDUCTOR DEVICES;
SENSORS;
SIGNAL PROCESSING;
SPURIOUS SIGNAL NOISE;
THERMOCOUPLES;
THERMOMETERS;
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EID: 18744377719
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1899463 Document Type: Article |
Times cited : (30)
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References (11)
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