Reactive sputter deposition of metal oxide nanolaminates

Journal of Physics Condensed Matter

Volumn 20, Issue 26, 2008, Pages

  Aita, Carolyn Rubin ^a  

^a University of Wisconsin Milwaukee   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METALLIC COMPOUNDS; METALS; SPUTTERING;

METAL OXIDES; NANO-LAMINATES; REACTIVE SPUTTER-DEPOSITION; UNHEATED SUBSTRATES;

SPUTTER DEPOSITION;

EID: 48249119978     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/20/26/264006     Document Type: Article

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