Temperature coefficients of SAW velocity for AlN thin film sputtered on ST-X quartz

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 239-242

  Kao, Kuo Sheng ^a   Chen, Ying Chung ^a   Lee, Yi Hung ^a   Cheng, Chien Chuan ^b  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b DE LIN INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; ALUMINUM NITRIDE; MAGNETRON SPUTTERING; NUMERICAL ANALYSIS; QUARTZ; SPUTTER DEPOSITION; THERMAL EFFECTS; THERMODYNAMIC STABILITY; THICKNESS MEASUREMENT; THIN FILMS;

PHASE VELOCITY; TEMPERATURE COEFFICIENT OF FREQUENCY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0036995023     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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