Combination of ZnO film and quartz to realize large coupling factor and excellent temperature coefficient for SAW devices

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1997, Pages 261-266

  Kadota, Michio ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE TRANSMISSION; INTERFACES (MATERIALS); QUARTZ; SUBSTRATES; ZINC OXIDE;

ELECTROMECHANICAL COUPLING FACTOR; FREQUENCY TEMPERATURE COEFFICIENT;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0031357151     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)