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Volumn 40, Issue 6-7, 2008, Pages 988-992
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X-ray photoelectron spectroscopy of SPE-grown bcc-Fe, polycrystal and β-FeSi2 phases on Si(111) surfaces
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Author keywords
FeSi2; Iron suicides; Si segregation; XPS
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Indexed keywords
ANNEALING;
CRYSTAL GROWTH;
ELECTRON SPECTROSCOPY;
EPITAXIAL GROWTH;
IRON;
MOLECULAR BEAM EPITAXY;
MOLECULAR ORBITALS;
MOLECULAR SPECTROSCOPY;
PHOTOELECTRICITY;
PHOTOELECTRON SPECTROSCOPY;
PHOTOIONIZATION;
PHOTONS;
POLYCRYSTALS;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON;
SILICON COMPOUNDS;
SOLAR RADIATION;
SPECTRUM ANALYSIS;
ULTRATHIN FILMS;
HIGH ENERGIES;
IN-SITU;
IRON DEPOSITION;
IRON SILICIDES;
LORENTZIAN;
SI (111);
SOLID PHASE EPITAXY (II/SPE);
SUBSEQUENT ANNEALING;
X RAY PHOTOELECTRON SPECTROSCOPY (XPS);
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 47749152579
PISSN: 01422421
EISSN: 10969918
Source Type: Journal
DOI: 10.1002/sia.2828 Document Type: Conference Paper |
Times cited : (6)
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References (34)
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