Energy filtering TEM analysis of nano-electronic device structures: Fast and efficient way to assess chemical microstructures

Materials Science and Technology

Volumn 24, Issue 6, 2008, Pages 667-674

  Weirich, T E ^a   Reinholdt, A ^a   Kreibig, U ^a   Mayer, J ^a,b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Core shell nanoparticles; Energy filtering TEM; MOSFET; MRAM devices

Indexed keywords

FIELD EFFECT TRANSISTORS; GARNETS; LITHOGRAPHY; MAGNETIC CIRCUITS; MAGNETIC STORAGE; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; RANDOM ACCESS STORAGE; SILICATE MINERALS; SULFATE MINERALS; THREE DIMENSIONAL;

CHARACTERISATION; CHEMICAL MAPPING; CHEMICAL MICROSTRUCTURES; CORE SHELL NANOPARTICLES; ELECTRONIC DEVICE STRUCTURES; ELEMENTAL DISTRIBUTIONS; ENERGY FILTERING TEM (EFTEM) ANALYSIS; ENERGY-FILTERING TRANSMISSION ELECTRON MICROSCOPY (EFTEM); FIELD EFFECTS; HIGH RESOLUTIONS; MAGNETIC (CE); MAGNETIC RANDOM ACCESS MEMORY (MRAM) CELL; MODEL DESIGN; NANO SCALING; NANO-ELECTRONICS; NANOSCALE MEMORIES; NOVEL DESIGN; THREE-DIMENSIONAL (3D) STRUCTURING;

MINERALS;

EID: 47549107274     PISSN: 02670836     EISSN: None     Source Type: Journal    
DOI: 10.1179/174328408X311099     Document Type: Article

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